Deposition of Ultrathin Fluoropolymer Films on Si(100) and GaAs(100) Surfaces by RF Magnetron Sputtering of Poly(tetrafluoroethylene-<i>c</i><i>o</i>-hexafluoropropylene)

Yang, Guang; Zhang, Yan; Kang, En‐Tang; Neoh, K. G.

doi:10.1021/jp0274031

Cited by 5 publications

(5 citation statements)

References 39 publications

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“…The polymer host shows a completely amorphous structure in the x-ray. It is known [16,17] that the sputtered polymer films have a completely different structure from the pristine PTFE as we observed with x-ray photoelectron spectroscopy (XPS). The C 1s core-level spectrum for pristine PTFE has only one peak at 292.0 eV due to the CF 2 -groups in the polymer chains.…”

mentioning

confidence: 57%

Controlled syntheses of Ag–polytetrafluoroethylene nanocomposite thin films by co-sputtering from two magnetron sources

et al. 2005

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Co-sputtering from two independent magnetron sources was used to prepare polymer–metal nanocomposite films. Both gradient films with increasing metal fraction and homogeneous composite films were produced from polytetrafluoroethylene (PTFE) and silver targets using a rotatable sample holder. The structure of the pure sputtered polymer as well as the composite structure was studied. Electrical properties of the composite material near the percolation threshold show the expected, sharp change in the resistivity from 107 Ω cm atsmall silver content to 10−3 Ω cm after percolation. The optical absorption in the visible region due to surface plasmon resonances also has a strong dependence on the metal content, showing a red shift of the absorption peak from 405 nm to more than 500 nm at higher silver content.

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confidence: 57%

Controlled syntheses of Ag–polytetrafluoroethylene nanocomposite thin films by co-sputtering from two magnetron sources

et al. 2005

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“…Therefore, the C 1 s signal position of 294.0 eV (Fig. 2a) can be assigned to a -CF 3 functionality [15,42,43,62]. On the contrary, RF Sputtering led to a high degree of PTFE target fragmentation and recombination of the desorbed species on the surface of the Si substrate.…”

Section: Refractive Index Measurementmentioning

confidence: 95%

“…Particularly regarding chemical composition, wettability, and morphology, RF-sputtered PTFE coatings were grown under several bias voltages and gas compositions on silicon wafers [42,43]. Thermally evaporated PTFE films have also been reported on several substrates, such as Aluminum [9], glass [44] intermetallic oxide alloys [45], micro-and nano-crystalline diamond-like carbon [46,47] to promote low surface energy and surface nano-roughness.…”

Section: Introductionmentioning

confidence: 99%

Adjustable, (super)hydrophobicity by e-beam deposition of nanostructured PTFE on textured silicon surfaces

et al. 2015

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Polytetrafluoroethylene (PTFE)-like films, produced by electron beam (e-beam) deposition, have shown higher hydrophobicity than those deposited by RF sputtering under similar deposition rates. It was found that this results from both surface chemical composition and nano-roughness. X-ray photoelectron spectroscopy measurements revealed that larger moieties of CF 2 and CF 3 groups were present to reduce surface energy in the e-beam deposited films. RF sputtering led to a higher degree of PTFE target fragmentation producing a different perfluorinated film on the Si substrate. Scanning electron microscopy and atomic force microscopy measurements revealed a much larger rms roughness on the film surfaces produced by e-beam (25.13 nm, at 20 mA) than those by RF sputtering (2.42 nm, at 100 W), and allowed a broad power spectrum density analysis with determination of the j B wetting parameter. In addition, the e-beam deposited films presented a linear increase of contact angle with applied electron current in the range under study (5-20 mA). This allows easy water repellency adjustment, up to 159 ± 2°. For a superhydrophobic state with self-cleaning, a micropyramid structure was wet etched on the Si wafer, followed by PTFE deposition, and a very low contact angle (163 ± 2°) and hysteresis was attained (\3°). These first results indicate that e-beam PTFE deposition with adjustable hydrophobicity may become a useful technique for integrated production with present Si microelectronics technology and for Si solar cells.

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“…The polymer host shows a complete amorphous structure in the X-ray. It is known , that the sputtered polymer films have a completely different structure than pristine PTFE as observed with X-ray photoelectron spectroscopy (XPS). The C1s core-level spectra for pristine PTFE have only one peak at 292.0 eV due to the CF 2 groups in the polymer chains.…”

Section: Methodsmentioning

confidence: 99%

Model Systems with Extreme Aspect Ratio, Tunable Geometry, and Surface Functionality for a Quantitative Investigation of the Lotus Effect

et al. 2007

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Superhydrophobicity and superhydrophilicity of surfaces are key properties for fabrication of self-cleaning surfaces (Lotus effect). It is well known that the mechanism behind this is based on the surface roughness and surface functionalization. To obtain an understanding of the details of the underlying mechanism, a metal system based on a eutectic is suggested. In this study, a wide range tunability of its needlelike narrow size distributed nanostructure is demonstrated. The length of the needles as well as their density can be varied independently. In addition, an important parameter for the wettability, the roughness, is related directly to the growth parameters, which lead to excellent controllable and reproducible eutectic structures. Simply by varying etching time very high aspect ratios can be achieved, allowing studying the interaction of the very long needles with liquids. Moreover, the surface functionality can be tuned by RF-magnetron sputtering of PTFE onto the metal needles. As those layers can be very thin, our system allows, in principle, studying the transition from a metal to a polymer surface using submonolayers. Furthermore, the first contact angle measurements on the nanostructured and functionalized eutectic structures are presented and discussed.

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Deposition of Ultrathin Fluoropolymer Films on Si(100) and GaAs(100) Surfaces by RF Magnetron Sputtering of Poly(tetrafluoroethylene-co-hexafluoropropylene)

Cited by 5 publications

References 39 publications

Controlled syntheses of Ag–polytetrafluoroethylene nanocomposite thin films by co-sputtering from two magnetron sources

Controlled syntheses of Ag–polytetrafluoroethylene nanocomposite thin films by co-sputtering from two magnetron sources

Adjustable, (super)hydrophobicity by e-beam deposition of nanostructured PTFE on textured silicon surfaces

Model Systems with Extreme Aspect Ratio, Tunable Geometry, and Surface Functionality for a Quantitative Investigation of the Lotus Effect

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