Deposition of titanium/titanium oxide clusters produced by magnetron sputtering

Ibrahimkutty, Shyjumon; Gopinadhan, Manesh; Helm, Christiane A.; Smirnov, Boris M.; Hippler, R.

doi:10.1016/j.tsf.2005.11.006

Cited by 96 publications

(77 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This derives both (1) from the higher number of cluster collisions with the gas atoms in the column drifting to the exit aperture, and (2) from the fact that the rate of cluster diffusion toward the surrounding walls decreases inversely with the diffusion coefficient and therefore inversely with the gas density (Smirnov 2000;Shyjumon et al 2006). As a result, the growing particles have a greater tendency to persist on their direct trajectories, their residence time decreases, and the growth is terminated sooner.…”

Section: Argon and Helium Supplymentioning

confidence: 99%

Influence of source parameters on the growth of metal nanoparticles by sputter-gas-aggregation

Khojasteh

Kresin

2017

Appl Nanosci

View full text Add to dashboard Cite

We describe the production of size-selected manganese nanoclusters using a magnetron sputtering/aggregation source. Since nanoparticle production is sensitive to a range of overlapping operating parameters (in particular, the sputtering discharge power, the inert gas flow rates, and the aggregation length), we focus on a detailed map of the influence of each parameter on the average nanocluster size. In this way, it is possible to identify the main contribution of each parameter to the physical processes taking place within the source. The discharge power and argon flow supply the metal vapor, and argon also plays a crucial role in the formation of condensation nuclei via three-body collisions. However, the argon flow and the discharge power have a relatively weak effect on the average nanocluster size in the exiting beam. Here the defining role is played by the source residence time, governed by the helium supply (which raises the pressure and density of the gas column inside the source, resulting in more efficient transport of nanoparticles to the exit) and by the aggregation path length.

show abstract

Section: Argon and Helium Supplymentioning

confidence: 99%

Influence of source parameters on the growth of metal nanoparticles by sputter-gas-aggregation

Khojasteh

Kresin

2017

Appl Nanosci

View full text Add to dashboard Cite

show abstract

“…[29]). However, the necessity of the oxidation step makes this approach not suitable for combination of GAS with other vacuum based deposition methods needed for instance for production of nanocomposites.…”

Section: A N U S C R I P Tmentioning

confidence: 99%

Preparation of metal oxide nanoparticles by gas aggregation cluster source

Shelemin

Kylián

Hanuš

et al. 2015

Vacuum

View full text Add to dashboard Cite

“…7 is a useful information on the relationship between the size of particulates and the discharge power in the synthesis of nanoparticles by magnetron sputtering. Furthermore, there have been intensive works showing that the growth of nano-clusters ranging between 1 and 100 nm is sensitive to the sputtering power, the gas pressure, the gas flow rate, and the aggregation distance [26][27][28][29][30][31].…”

Section: Evaluations Of Size and Density Of Particulatesmentioning

confidence: 99%

Synthesis characteristics of Cu particulates in high-pressure magnetron sputtering plasmas studied by in situ laser-light scattering

Nayan

Sasaki

2012

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

Abstract.This paper reports the temporal evolution, the dependence on the discharge conditions, and the spatial distribution of Cu particulates synthesized in high-pressure magnetron sputtering plasmas. The spatial distributions of the size and the density of particulates were examined with precision using a two-wavelength laser light scattering technique. We found that more than 50% of Cu particulates in the discharge space had sizes ranging between 100 and 175 nm. The absolute density of Cu particulate was on the order of 10 7 − 10 9 cm −3 . Cu particulates had concentrated distributions in the boundary between the bright plasma and the dark region and in the region connecting to the anode of the magnetron sputtering source. The spatial distribution, the size distribution, and the density of Cu particulates were sensitively dependent on the discharge power and the pressure.

show abstract

Deposition of titanium/titanium oxide clusters produced by magnetron sputtering

Cited by 96 publications

References 21 publications

Influence of source parameters on the growth of metal nanoparticles by sputter-gas-aggregation

Influence of source parameters on the growth of metal nanoparticles by sputter-gas-aggregation

Preparation of metal oxide nanoparticles by gas aggregation cluster source

Synthesis characteristics of Cu particulates in high-pressure magnetron sputtering plasmas studied by in situ laser-light scattering

Contact Info

Product

Resources

About