Deposition of TiSiN coatings by arc ion plating process

Comparison of crack resistance between ternary CrSiC and quaternary CrSiCN coatings via nanoindentation

“…For instance, TiSiN coatings presented high hardness over 30 GPa due to refined grain, compact microstructure and a nano-composite architecture after Si addition [9][10][11]. As a result, long service life was obtained when TiSiN coatings were applied on cutting tools [6,7]. Likewise, with Si alloying, CrSiN coatings became harder than CrN coatings [13][14][15][16], and therefore, the friction coefficient and wear rate of tribopair decreased from 0.55 to 0.4 and from 11.0 Â 10 À 7 mm 3 /Nm to 5.0 Â 10 À 7 mm 3 /Nm, respectively [19].…”

“…Thereby, in order to meet growing requirement in industry for superior coatings with good mechanical and tribological properties, academic circles have concentrated on building a composite architecture of nano-crystal dispersing into amorphous SiN x matrix . One of the most common ways is to introduce Si element into transition metalbased coatings such as TiN [6][7][8][9][10][11][12], CrN [13][14][15][16][17][18][19], ZrN [20], MoN [21], TaN [22], TiCN [23][24][25] and CrCN [26][27][28]. For instance, TiSiN coatings presented high hardness over 30 GPa due to refined grain, compact microstructure and a nano-composite architecture after Si addition [9][10][11].…”

Evolution of enhanced crystallinity and mechanical property of nanocomposite Ti–Si–N thin films using magnetron reactive co-sputtering

“…The ternary compound ''Ti-Si-N'' is one of the popular materials for superior hardness which is affected by phase and microstructure of the nanocrystalline TiN (nc-TiN) and amorphous SiN x (a-SiN x ) matrix. Ti-Si-N films can be prepared by chemical vapor deposition (CVD) [4,9] and physical vapor deposition (PVD) [5][6][7][8]10]. Their mechanical properties are much related to microstructure and process parameters [5][6][7][8].…”

Effect of Thermal Annealing Upon Residual Stress and Mechanical Properties of Nanostructured TiSiN Coatings on Steel Substrates

“…N anostructured TiSiN coatings commonly consist of TiN nanocrystallites embedded in an amorphous matrix of silicon nitride 1,2 . These coatings possess very high hardness and good chemical resistance and have potential for a wide range of applications from cutting tools to jet engines 2,3 …”