2009
DOI: 10.1590/s1516-14392009000400008
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Deposition of thin film of titanium on ceramic substrate using the discharge for hollow cathode for Al2O3/Al2O3 indirect brazing

Abstract: Thin films of titanium were deposited onto Al 2 O 3 substrate by hollow cathode discharge method for the formation of a ceramic-ceramic joint using indirect brazing method. An advantage of using this technique is that a relatively small amount of titanium is required for the metallization of the ceramic surface when compared with other conventional methods. Rapidly solidified brazing filler of Cu 49 Ag 45 Ce 6 in the form of ribbons was used. The thickness of deposited titanium layer and the brazing temperatur… Show more

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Cited by 4 publications
(3 citation statements)
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“…Os gases utilizados nesse trabalho foram introduzidos no reator por dois caminhos, o primeiro passando pelo centro do cátodo oco (8). O segundo caminho utilizado foi no flange inferior (9). Todos os fluxos dos gases foram controlados por fluxímetro digital da MKS de quatro canais (modelo 247).…”
Section: Materiais E Métodosunclassified
See 1 more Smart Citation
“…Os gases utilizados nesse trabalho foram introduzidos no reator por dois caminhos, o primeiro passando pelo centro do cátodo oco (8). O segundo caminho utilizado foi no flange inferior (9). Todos os fluxos dos gases foram controlados por fluxímetro digital da MKS de quatro canais (modelo 247).…”
Section: Materiais E Métodosunclassified
“…Pela variação dos parâmetros do plasma estas técnicas oferecem a possibilidade de variar as propriedades dos filmes (Marinho et al, 2009). Pós-descarga de catodo oco vem tornando-se uma promissora candidata como fonte de sputtering (pulverização catódica) devido a sua simplicidade de elaboração de projeto, operação, bom controle dos parâmetros e baixo custo (G., 2005).…”
Section: Introductionunclassified
“…To address these problems, a new alternative material to ITO was needed. In this sense, thin-film materials were developed with numerous channel materials incorporated with impurity doping such as Zn-doped In 2 O 3 [9], Mo-doped In 2 O 3 [8,9], or Ti-In 2 O 3 [10][11][12] that are found to be an ITO alternative for the transparent conducting application [13]. Titanium-doped indium oxide (ITiO) was considered the best choice because ITiO has a relatively low sheet resistance and demonstrates a high transmission in the near infrared (NIR), apart from its high mobility [10].…”
Section: Introductionmentioning
confidence: 99%