Deposition of polymer films by rf discharge at atmospheric pressure

Abstract

In this contribution we report some typical properties of the discharge which has been used for deposition of thin films and some mechanical parameters of thin films. RF plasma nozzle can burn very well even at atmospheric pressure. Special properties of RF discharges offer hopeful technological applications like deposition of thin solid films. The knowledge of physical parameters of plasma has been required. The parameters of the plasma were investigated by spectral and optical methods. The powered RF electrode of the torch discharge plasma source is made from the metal or dielectric pipe with an inner diameter of 1 ÷ 2 mm and with a length of several centimeters. The electrode is connected through the matching unit to the RF generator driven at the frequency of 13.56 MHz. The mixture of argon and n-hexane or HMDSO (hexamethyldisiloxane, C6H18Si2O) gas flows through the RF electrode at the pipe Fig. 1. Polymer films were deposited on the several substrates e.g. glass, brass polished plates and Si wafers.

Possibilities and analytical properties of the radiofrequency plasma pencil operating in the continuous and in the pulsed mode

“…1) and that is why it was impossible to realize any measurements. 25 Previous studies 27,28 showed similar values of the measured N e , T e and T g as in this new work.…”

“…1) and that is why there was impossible to realize any measurements [25]. Previous studies [27,28] showed similar values of the measured N e , T e and T g as in this new work. Error bars from the electron number density calculations are 55 approximately ± 15 %.…”

“…In 30 the first mentioned case an optical emission diagnostics of the plasma is a very frequent approach. Herein the following parameters were measured: Gas temperature (T g ) from Boltzmann plots of rotational lines (Q 1 1-Q 1 9) of OH spectra, excitation temperature (T e ) from a set of argon atomic lines (603.21, 667.73, 35 675.28, 687.13 and 714.70 nm) and electron number density (N e ) from H β line Stark broadening yielded from the fitting the line intensity profile by the Voigt function [25, 27,28]. [3][4][5].…”

Miniaturized non-thermal atmospheric pressure plasma jet—characterization of self-organized regimes

“…Applications include surface cleaning, surface activation, film deposition and the reduction of micro-organisms [1][2][3][4][5][6][7][8][9].…”

Effects of easily ionisable elements on copper and zinc lines excited in a plasma pencil

“…2,3 The convenience for special polymer lm deposition has also been proven. 4 It has been further tested as an alternative excitation source for elemental analysis of liquids. 5 The analytical prot of the plasma pencil has been shown during the determination of Li, Na, Mg, Ca, Cu and Zn in aqueous solutions as representatives of alkali, alkali-earth and transition metals.…”