Films of Hg ͑1-x͒ Cd x Te ͑MCT͒ were grown using electrochemical atomic layer deposition, the electrochemical analog of atomic layer epitaxy, and atomic layer deposition ͑ALD͒. The present study describes the growth of MCT via electrochemical ALD, using an automated electrochemical flow cell deposition system. The system allows potential control and solution exchange as desired. Deposits were characterized using X-ray diffraction, electron probe microanalysis, and reflection absorption Fourier transform infrared spectroscopy. The as-deposited films showed strong ͑111͒ preferred orientation. No postdeposition annealing was required. Changes in deposit composition showed the expected trend in bandgaps: the more Hg the lower the bandgap, but with some significant deviations. Deposit composition was controlled using a superlattice deposition program. Hg 0.5 Cd 0.5 Te and Hg 0.8 Cd 0.2 Te deposits resulted in bandgaps of 0.70 and 0.36 eV, respectively. Electrochemical quartz crystal microbalance studies, using an automated flow cell, indicated that some deposited Cd was stripping at potentials used to deposit Hg. In addition, redox replacement of Cd for Hg was evident, a function of the greater stability of Hg than Cd.Hg ͑1-x͒ Cd x Te ͑MCT͒ is an important ternary compound semiconductor, belonging to the II-VI family, 1 with a direct bandgap anywhere between −0.15 and 1.6 eV, determined by the Hg/Cd ratio. Because of its optical and electronic properties, and its tunable bandgap, there has been extensive interest in MCT for a number of applications, 2 such as IR detector materials when it is Hg-rich, and photovoltaics for the Cd-rich alloys. 3,4 Traditionally MCT has been prepared by various vapor phase techniques like molecular beam epitaxy ͑MBE͒, 5-7 metallorganic chemical vapor deposition ͑MOCVD͒, 8,9 Metallorganic vapor phase epitaxy ͑MOVPE͒, 10,11 or by liquid phase epitaxy. [12][13][14][15] There have also been reports of MCT formation using pulse laser deposition ͑PLD͒ 16,17 and laser evaporation. 18 High-quality Hg-rich films have been prepared by most of the above techniques but at a relatively high cost. Thus, such methods are questionable for the deposition of Cd-rich MCT films for photovoltaic applications, where cost is of central importance. Electrodeposition tends to be a cost-effective methodology. Some work on MCT electrodeposition has been performed, mostly using the codeposition methodology, where a single solution contains precursors for all constituent elements, and a single potential or current density is used to form the deposit. 3,19-24 Most such studies were performed in aqueous solutions, though some nonaqueous solutions have also been studied. 25,26 Only moderate success has been obtained in the electrodeposition of MCT. In nearly all cases low crystallinity was observed for as-formed deposits, requiring postdeposition annealing to display a reasonable XRD pattern.Electrochemical ALD is the electrochemical analog of atomic layer epitaxy ͑ALE͒ 27-29 and atomic layer deposition ͑ALD͒. 30-33 Al...