Deposition of diamondlike films by electron cyclotron resonance microwave plasmas

Abstract

Hard a-C:H films have been deposited through electron cyclotron resonance (ECR) microwave plasma decomposition of CH4 diluted with H2 gas. It has been found that hard diamondlike films could only be produced under a rf-induced negative self-bias of the substrate stage. Raman spectra indicate the deposition of two distinct film types: one film type exhibiting well-defined bands at 1360 and 1580 cm−1 (the graphitic D and G bands) and another displaying a broad Raman peak centered at approximately 1500 cm−1. The optical gaps of these films are from 1.0 to 1.6 eV, respectively, with resistivities >1012 Ω cm. Variation of the mirror magnetic-field profile of the ECR system was examined, demonstrating the manipulation of film morphology through the extraction of different ion energies.

Diamond-like bonds in amorphous hydrogenated carbon films induced by x-ray irradiation

“…For rfplasma CVD, which uses a hydrocarbon source, substrate temperatures and ion energy in the plasma are the most important parameters. 7 For the laser deposition technique, higher laser intensity produced more the diamond-like films. 5 Similar bias effects have been reported for ECR-CVD.…”

Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

“…2,3 Diamond-like carbon (DLC) thin films are well suited for applications such as tribological coatings, 4 integrated circuit passivation coatings, 5 and infrared optical coatings. [9][10][11] The addition of an independent RF-biased substrate stage to the microwave ECR system has been shown to be useful in modifying DLC film properties. 7,8 A number of studies of DLC deposition in microwave ECR systems have been performed; in these works methane, methane-hydrogen mixtures, or acetylene were used as the source gas.…”

Deposition of diamond-like carbon films using the screen grid method in electron cyclotron resonance chemical vapor deposition

“…1 These properties make the films suitable for a number of applications such as protective and antireflection coatings, wear-resistant overcoats and low-friction wear resistant coating. [6][7][8] These include the high ion density and high electron temperature of the plasma which are achieved through the efficient excitation of the plasma under the ECR. [6][7][8] These include the high ion density and high electron temperature of the plasma which are achieved through the efficient excitation of the plasma under the ECR.…”

“…[11][12][13] It has also been reported that DLC films can be obtained by applying a direct dc bias to the substrate holder. 6,14 Our work on hydrogenated amorphous carbon ͑a-C:H͒ film deposition using direct dc bias has also failed to produce films with diamond-like characteristics under different deposition conditions. 6,14 Our work on hydrogenated amorphous carbon ͑a-C:H͒ film deposition using direct dc bias has also failed to produce films with diamond-like characteristics under different deposition conditions.…”