1996
DOI: 10.1016/0254-0584(96)80097-6
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Deposition of diamond-like carbon films on an iron substrate by a pulsed high-density plasma beam at room temperature

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Cited by 10 publications
(9 citation statements)
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“…The deposition thickness of the DLC films at various electrode currents for 1600 pulses of the laser input are listed in Table 5. It also shows that the critical loading of the DLC in the scratch test is up to 19 N. Since the average loading for the DLC film deposed by other physical vapor deposition methods is approximately 20 -30 N for iron substrates [3], the mechanical strength of the DLC film made by the proposed hybrid method at atmospheric pressure is in a reasonable range.…”
Section: Characteristics Of the Dlc Filmmentioning
confidence: 77%
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“…The deposition thickness of the DLC films at various electrode currents for 1600 pulses of the laser input are listed in Table 5. It also shows that the critical loading of the DLC in the scratch test is up to 19 N. Since the average loading for the DLC film deposed by other physical vapor deposition methods is approximately 20 -30 N for iron substrates [3], the mechanical strength of the DLC film made by the proposed hybrid method at atmospheric pressure is in a reasonable range.…”
Section: Characteristics Of the Dlc Filmmentioning
confidence: 77%
“…A variety of the techniques has been developed to form the diamond-like carbon film in literature [1][2][3][4][5][6]. Pulsed laser deposition (PLD) is one of the methods with laser energy for DLC film deposition application in low pressure [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…Different deposited films with different compositions and physical as well as mechanical properties could be obtained by changing the electrodes material, working gases and operation parameters [4]. Accomplishment of carbon coatings using the stated technique have a wide variety of industrial applications due to their high hardness, excellent corrosion resistance, wide range of optical transparency and electrical properties [5][6][7][8][9]. Carbon films in the form of Diamond-like Carbon (DLC) were deposited by using high-density plasma by different techniques [5].…”
Section: Introductionmentioning
confidence: 99%
“…Accomplishment of carbon coatings using the stated technique have a wide variety of industrial applications due to their high hardness, excellent corrosion resistance, wide range of optical transparency and electrical properties [5][6][7][8][9]. Carbon films in the form of Diamond-like Carbon (DLC) were deposited by using high-density plasma by different techniques [5].…”
Section: Introductionmentioning
confidence: 99%
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