Deposition of Co-Cr films with large magnetization on polyethylene naphthalate tape

Abstract

It is difficult for Co~rich Co-Cr film to orient its magnetization moment perpendicularly because of large saturation magnetization M,. The two-step sputtering method with the facing targets sputtering system was useful for depositing CO S3 Cr 17 films with large Ms and the perpendicular magnetic anisotropy on the very thin Co 79 Cr ZI underlayer with the good c-axis orientation continuously on the polyethylene naphthalate tape substrate. The underlayer was helpful for improving the perpendicular magnetic anisotropy of CO S3 Cr J7 films.

Playback performance and microstructure of sputtered tape media formed by facing targets sputtering

“…FTS [3] is suitable for forming tape recording media with good granular isolation at room temperature without biasing, heating, and cooling, thanks to suppression of influx of electrons and less damage of a film substrate from detached plasma.…”

Playback Performance of Facing Targets Sputtered Tape Media on Moving Tape Substrate with a High Speed

“…The new method is called the 'facing targets sputtering' (FTS) method [3] which consists of two facing targets with the magnetic field perpendicular to the surface of the targets. The magnetic field traps the plasma between two targets so that gamma electrons and charged particles do not touch the surface of the substrate.…”