While
seeded growth of quasi-spherical colloidal Au nanoparticles
(NPs) has been extensively explored in the literature, the growth
of surface supported arrays of such particles has received less attention.
The latter scenario offers some significant challenges, including
the attainment of sufficient particle-substrate adhesion, growth-selectivity,
and uniform mass-transport. To this end, a reaction system consisting
of HAuCl
4
, citrate, and H
2
O
2
is here
investigated for the growth of supported arrays of 10 nm Au seeds,
derived via block copolymer (BCP) lithography. The effects of the
reagent concentrations on the properties of the resultant NPs are
evaluated. It is found that inclusion of citrate in the growth medium
causes substantial particle desorption from Si surfaces. However,
the presence of citrate also yields NPs with more uniformly circular
top-view cross sections (“quasi-circular”), motivating
the exploration of particle immobilization methods. We demonstrate
that atomic layer deposition (ALD) of a single cycle of HfO
2
(∼1 Å), after the seed particle formation, promotes
adhesion sufficiently to enable the use of citrate without the added
oxide noticeably affecting the shape of the resultant NPs. The presented
ALD-based approach differs from the conventional sequence of depositing
the adhesion layer prior to the seed particle formation and may have
advantages in various processing schemes, such as when surface grafting
of brush layers is required in the BCP lithography process. A proof-of-concept
is provided for the growth of large-area arrays of supported “quasi-circular”
Au NPs, in a rapid one-step process at room temperature.