Deposition kinetics and narrow-gap-filling in Cu thin film growth from supercritical carbon dioxide fluids

Kondoh, Eiichi; Fukuda, J.

doi:10.1016/j.supflu.2007.12.004

Cited by 65 publications

(83 citation statements)

References 18 publications

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“…The SCFD technique takes advantage of particular characteristics of supercritical fluids, namely, low viscosity, high diffusivity and ability to control the solubility of solutes. This technique is expected to markedly improve the coat-ability, embedded quality, and deposition rate, and to increase the number of feasible precursors compared with existing methods, such as physical vapor deposition, chemical vapor deposition and atomic layer deposition [2][3][4].…”

Section: Introductionmentioning

confidence: 99%

“…The solubilities of copper(II) and chromium(III) ␤-diketonates were measured using a static method by Lagalante et al [5] who reported that the solubilities of the metal complexes that included fluorine atoms in their ligand functional groups were greater than those without fluorine atoms. Roggeman et al [6] measured the solubility of iron(III) acetylacetonate (Fe(acac) 3 ) in pure scCO 2 and in the scCO 2 + 3 mol% chloroform mixture using a static-type apparatus. Solubility was measured by analysis of concentration of the samples in the scCO 2 phase using an ultraviolet-visible (UV-vis) spectrometer.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Measurement of the solubility of metal complexes in supercritical carbon dioxide using a UV–vis spectrometer

Haruki

Kobayashi

Kishimoto

et al. 2009

Fluid Phase Equilibria

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Measurement of the solubility of metal complexes in supercritical carbon dioxide using a UV–vis spectrometer

Haruki

Kobayashi

Kishimoto

et al. 2009

Fluid Phase Equilibria

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“…SCFs have higher solvent properties than gases and better transport properties than liquids. Consequently, mass transfer rate is improved due to the relatively low viscosity, high diffusivity, and low surface tension (Kondoh and Fukuda, 2008). Under such conditions, the mixture of feedstock (triglyceride) and acyl acceptor (alcohol) becomes homogenous where esterification and transesterification can be carried out simultaneously at a high rate.…”

Section: Supercritical Fluid Technologymentioning

confidence: 99%

“…Supercritical biodiesel production, employed at temperatures and pressures above the critical value of fluid provides improved mass transfer rate while promoting esterification and transesterification at high rates (Kondoh and Fukuda, 2008). Biodiesel synthesis in supercritical carbon dioxide (SC-CO2) thus provides an alternative to the expensive supercritical methanol-based method.…”

Section: Introductionmentioning

confidence: 99%

Green biodiesel production: a review on feedstock, catalyst, monolithic reactor, and supercritical fluid technology

et al. 2016

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Please cite this article as: Gumba R.E., Saallah S., Misson M., Ongkudon C.M., Anton A. Green biodiesel production: a review on feedstock, catalyst, monolithic reactor and supercritical fluid technology. Biofuel Research Journal 11 (2016) The advancement of alternative energy is primarily catalyzed by the negative environmental impacts and energy depletion caused by the excessive usage of fossil fuels. Biodiesel has emerged as a promising substitute to petrodiesel because it is biodegradable, less toxic, and reduces greenhouse gas emission. Apart from that, biodiesel can be used as blending component or direct replacements for diesel fuel in automotive engines. A diverse range of methods have been reported for the conversion of renewable feedstocks (vegetable oil or animal fat) into biodiesel with transesterification being the most preferred method. Nevertheless, the cost of producing biodiesel is higher compared to fossil fuel, thus impeding its commercialization potentials. The limited source of reliable feedstock and the underdeveloped biodiesel production route have prevented the full-scale commercialization of biodiesel in many parts of the world. In a recent development, a new technology that incorporates monoliths as support matrices for enzyme immobilization in supercritical carbon dioxide (SC-CO2) for continuous biodiesel production has been proposed to solve the problem. The potential of SC-CO2 system to be applied in enzymatic reactors is not well documented and hence the purpose of this review is to highlight the previous studies conducted as well as the future direction of this technology. © 2016 BRTeam. All rights reserved.Journal homepage: www.biofueljournal.com Research Unit, Universiti Malaysia Sabah, Kota Kinabalu, Sabah, 88400, Malaysia. Gumba et al. / Biofuel Research Journal 11 (2016) [431][432][433][434][435][436][437][438][439][440][441][442][443][444][445][446][447] Please cite this article as: Gumba R.E., Saallah S., Misson M., Ongkudon C.M., Anton A. Green biodiesel production: a review on feedstock, catalyst, monolithic reactor and supercritical fluid technology. Energy

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“…However, a new technology is required for the demand of next-generation devices. For the miniaturization of interconnects in the devices, investigation on improvement of the dry processes, such as CVD and PVD [19,20], and electrodeposition methods [21] have been conducted. However, there are still many problems needed to be solved before the wiring technology can be practically used in the industries.…”

Section: Damascene Process and The Problems In Nanosized Miniaturizationmentioning

confidence: 99%

Nanoscale Cu Wiring by Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte

Sone

2015

Electroplating of Nanostructures

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Novel electrodeposition (ED) techniques utilizing supercritical carbon dioxide (scCO 2 ) emulsions (SCE) are introduced. ScCO 2 has low surface tension and high compatibility with hydrogen. Thus, this method is applied in fine Cu wiring to allow the complete filling of Cu into nanoscale confined space. The electrochemical reactions are carried out in emulsions composed of an aqueous electrolyte, scCO 2 , and surfactants. Three aspects in fine Cu wiring will be introduced, which are the dissolution of the Cu seed layer in the SCE, the gap-filling capability of the ED-SCE, and the contamination in the plated Cu. At first, the dissolution of the Cu seed layer in the SCE was observed. In order to prevent the dissolution of the Cu seed layer, the addition of Cu particles into the SCE was found to be effective. The electrolyte containing the SCE and the Cu particles is named scCO 2 suspension (SCS). The gapfilling capability was evaluated using test element groups (TEGs) with patterns of vias with a diameter of 70 nm and an aspect ratio of 5. Many defects were observed in the vias filled using the conventional electrodeposition (CONV) method. On the other hand, defect-free fillings were obtained by the ED-SCS method. Because of the highpressure environment needed to form the scCO 2 , the reaction cells are usually batchtype high-pressure vessels. In order to improve the feasibility of the ED-SCS technique, a continuous-flow reaction system is also proposed and examined using a round-type large-area TEG with a diameter of 300 mm. Complete fillings were obtained for vias with a diameter of 60 nm and an aspect ratio of 5 on the large-area TEG. This result was in good agreement with that of the batch-type reaction system and demonstrated the successful application of the continuous-flow system with ED-SCS.

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Deposition kinetics and narrow-gap-filling in Cu thin film growth from supercritical carbon dioxide fluids

Cited by 65 publications

References 18 publications

Measurement of the solubility of metal complexes in supercritical carbon dioxide using a UV–vis spectrometer

Measurement of the solubility of metal complexes in supercritical carbon dioxide using a UV–vis spectrometer

Green biodiesel production: a review on feedstock, catalyst, monolithic reactor, and supercritical fluid technology

Nanoscale Cu Wiring by Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte

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