Deposition and composition-control of Mn-doped ZnO thin films by combinatorial pulsed laser deposition using two delayed plasma plumes

Abstract

The effect of the top electrode interface on the hysteretic behavior of epitaxial ferroelectric Pb(Zr,Ti)O3 thin films with bottom SrRuO3 electrode J. Appl. Phys. 112, 064116 (2012) Pulsed laser ablation of complex oxides: The role of congruent ablation and preferential scattering for the film stoichiometry Appl. Phys. Lett. 101, 131601 (2012) Applications of pulsed laser ablation for enhanced gold nanofluids J. Appl. Phys. 112, 063113 (2012) Growth processes of lithium titanate thin films deposited by using pulsed laser deposition Thin films of ZnO doped with manganese were deposited by double-beam, combinatorial pulsed laser deposition. The laser-induced plasmas were studied by means of fast photography and using a Langmuir probe, whereas the films were analyzed by x-ray-diffraction and energy-dispersive x-ray spectroscopy. The effect of the relative delay between plasma plumes on the characteristics of the films was analyzed. It was found that using this parameter, it is possible to control the dopant content keeping the oriented wurtzite structure of the films. The minimum content of Mn was found for plume delays between 0 and 10 ls as the interaction between plasmas scatters the dopant species away from the substrate, thus reducing the incorporation of Mn into the films. Results suggest that for delays shorter than $100 ls, the expansion of the second plume through the region behind the first plume affects the composition of the film. V C 2012 American Institute of Physics.

Detection of zinc blende phase by the pulsed laser photoacoustic technique in ZnO thin films deposited via pulsed laser deposition

“…This was achieved by allowing a constant flow of O 2 into the chamber. The election of this pressures was due to the fact of having obtained with them the best composition and structure of ZnO films in previous works [31].…”

Data of plasma velocity obtained from Streak image processing of laser-induced breakdown

“…On the other hand, optical lines emission due to the electron transitions in laser-induced plasma can be used to obtain the crucial information for elemental analysis of samples in all three states. Studying the plasma formation with a high temporal and spatial resolution is therefore of a great importance in a laser-induced material transfer Bohandy et al (1986); Mattle et al (2012); Feinaeugle et al (2012), pulsed-laser deposition Lunney (1995); Sánchez-Aké et al (2012); Guzmán et al (2013), and various industrial applications Bilmes et al (2006); Lackner et al (2004). The velocity field measurement of LIB plasma plumes in air has been the subject of various experimental techniques in recent years Koll et al (2020); Shi et al (2019); Nishihara et al (2020).…”