Dependence of surface nano-structural modifications of Ti implanted by N+ ions on temperature

Firouzi-Arani, Masoumeh; Savaloni, Hadi; Ghoranneviss, M.

doi:10.1016/j.apsusc.2010.01.083

Cited by 13 publications

(10 citation statements)

References 41 publications

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“…Vaz et al [5] studied structural, physical and mechanical properties of sub-stoichiometric TiN x thin films. In our earlier work [6] on the nanostructural modification of Ti implanted with N þ ions as a function of substrate temperature we reported on the development of titanium nitride with different compositions in the implanted sample as well as the presence of different titanium compositions such as titanium oxides. As mentioned in [6], although a great amount of literature on TiN exists, to the best of our knowledge, there has been no study on the stoichiometric changes made during the N þ ion implantation of bulk titanium (sheet/foil) samples prior to our work [6].…”

Section: Introductionmentioning

confidence: 98%

Surface nanostructural modifications of Ti implanted by N⁺ ions as a function of energy

Firouzi-Arani

Savaloni

2011

Philosophical Magazine

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The surface modification of titanium foil/sheet samples (0.5 mm thickness) implanted by nitrogen ions of different energy and fluence of 1 Â 10 18 N þ cm À2 was studied using X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy and secondary-ion mass spectrometry (SIMS). XRD patterns showed the development of titanium nitride with different compositions in the implanted samples, and the presence of different titanium compositions such as titanium oxides was also observed. AFM images at 16 and 20 keV showed the formation of grains, which were attributed to the initial sputtering of grain boundaries. The morphology of the surface changed at 25 keV showing granular structure with an almost uniform background and lowest surface roughness relative to lower and higher implantation energies. A correlation was obtained between all results for XRD, SIMS and AFM except the titanium nitride maximum intensity at 25 keV N þ implantation. In order to achieve more detailed information about the role of N þ energy in this kind of work it is proposed that a further investigation is needed on both N þ energy and substrate temperature as well as some theoretical studies.

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Section: Introductionmentioning

confidence: 98%

Surface nanostructural modifications of Ti implanted by N⁺ ions as a function of energy

Firouzi-Arani

Savaloni

2011

Philosophical Magazine

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“…Figure 1 shows XRD results for the nine different experimental conditions. Two XRD peaks at around 40°-70°are observed, which correspond to the MoS 2 (103) and Ti (103), respectively (Ma et al 2009;Firouzi-Arani et al 2010). Full with at half maximum (FWHM) of the peak is inversely related to the crystal size (Kahraman et al 2005).…”

Section: Characterizationmentioning

confidence: 97%

Effect of sputtering power on friction coefficient and surface energy of co-sputtered titanium and molybdenum disulfide coatings and its performance in micro hot-embossing

et al. 2013

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Si micromolds are common for fabrication of polymer-based microfluidic devices by hot-embossing because of the well established fabrication methods for Si, e.g., deep reactive ion etching, for favorable surface finish and accuracy. The problems with low yield, poor reproducibility, premature failure and limited lifetime of a Si micromold are induced by high friction and surface adhesion generated during demolding. Therefore, Titanium (Ti) and molybdenum disulfide (MoS 2 ) coatings were deposited on Si micromolds via magnetron co-sputtering at various combinations of target powers to improve its surface properties. Coating composition, crystallographic orientation, roughness, critical load, hardness, friction coefficient and surface energy were measured by X-ray photoelectron spectroscopy, X-ray diffraction, atomic force microscopy, scratch testing, nanoindentation, ball-on-disc tribometry and the contact angle method respectively. A statistical design of experiment matrix was used to investigate the effect of the Ti and MoS 2 target powers on the friction coefficient and surface energy of the coatings. From this designed experiment, it was observed that increasing MoS 2 target power was associated with increasing surface energy and decreasing friction coefficient and target powers had statistically significant effects on these parameters. Crystallinity, roughness and hardness of the coatings increased with increasing Ti concentration. A mathematical model of the effects of Ti and MoS 2 target powers on the friction coefficient and surface energy of the coatings has been fit to the experimental results using the response surface method. Uncoated and MoS 2 -Ti coated Si micromolds were used in hot-embossing for a comparative study on replication performance of uncoated and various coated micromolds. Hotembossed PMMA microstructures showed that coating improve replication performance of Si micromolds. Si micromold coated with co-sputter of Ti and MoS 2 at power of 300 and 75 W respectively, showed better replication quality among the selected target powers.

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“…The formation of this layer may not be enough to avoid wear under severe testing conditions. Physical vapor deposition (PVD) techniques such as direct-current (DC) magnetron sputtering, ion plating, and plasma-based ion implantation are employed to deposit TiN thin films [10][11][12].…”

Section: Introductionmentioning

confidence: 99%

The Study of Surface Properties of Tokamak First Wall Using TiN Coated on Stainless Steel

2015

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Structural properties of the synthesized TiN thin film on 316L stainless steel (S.S.316L) were studied to determine its potential application as a protective layer for first wall of Tokamaks. For this purpose we deposited TiN on stainless steel 316L (TiN/S.S.316L) via DC magnetron sputtering method and annealing at 700°C. Before and after exposure, samples were analyzed by using scanning electron microscopy (SEM), X-ray diffraction (XRD) and a spectrophotometer. The XRD analysis for studying crystalline structure of samples shows the position and intensity of XRD peaks has changed after exposing to 500 shots of Tokamak. It was found that the S.S.316L sample was severely damaged, its reflection dropped significantly but the SEM images show that plasma exposure has not created any cracks and lines on the surface of the TiN/S.S.316L sample and mass of dust particle has been assembled in some area of the sample.

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Dependence of surface nano-structural modifications of Ti implanted by N+ ions on temperature

Cited by 13 publications

References 41 publications

Surface nanostructural modifications of Ti implanted by N⁺ ions as a function of energy

Surface nanostructural modifications of Ti implanted by N⁺ ions as a function of energy

Effect of sputtering power on friction coefficient and surface energy of co-sputtered titanium and molybdenum disulfide coatings and its performance in micro hot-embossing

The Study of Surface Properties of Tokamak First Wall Using TiN Coated on Stainless Steel

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Dependence of surface nano-structural modifications of Ti implanted by N+ ions on temperature

Cited by 13 publications

References 41 publications

Surface nanostructural modifications of Ti implanted by N+ ions as a function of energy

Surface nanostructural modifications of Ti implanted by N+ ions as a function of energy

Effect of sputtering power on friction coefficient and surface energy of co-sputtered titanium and molybdenum disulfide coatings and its performance in micro hot-embossing

The Study of Surface Properties of Tokamak First Wall Using TiN Coated on Stainless Steel

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Surface nanostructural modifications of Ti implanted by N⁺ ions as a function of energy

Surface nanostructural modifications of Ti implanted by N⁺ ions as a function of energy