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Micro/nano hot-embossing and injection molding are two promising manufacturing processes for the mass production of workpieces bearing micro/nanoscale features. However, both the workpiece and micro/nano-mold are susceptive to structural damage due to high thermal stress, adhesion and friction, which occur at the interface between the workpiece and the mold during these processes. Hence, major constraints of micro/nano-molds are mainly attributed to improper replication and their inability to withstand a prolonged sliding surface contact because of high sidewall friction and/or high adhesion. Consequently, there is a need for proper surface coating as it can improve the surface properties of micro/nano-molds such as having a low friction coefficient, low adhesion and low wear rate. This review deals with the physical, mechanical and tribological properties of various surface coatings and their impact on the replication efficiency and lifetime of micro/nano-molds that are used in micro/nano hot-embossing and injection molding processes.

Pure carbon-(C), nitrogen-(N) and titanium-(Ti) doped diamond-like carbon (DLC) coatings were deposited on silicon (Si) micro-molds by dc magnetron sputtering deposition to improve the tribological performance of the micro-molds. The coated and uncoated Si molds were used in injection molding for the fabrication of secondary metal-molds, which were used for the replication of micro-fluidic devices. The bonding structure, surface roughness, surface energy, critical load and friction coefficient of the DLC coatings were characterized with micro-Raman spectroscopy, atomic force microscopy (AFM), contact angle, microscratch and ball-on-disc sliding wear tests, respectively. It was observed that the doping conditions had significant effects on Raman peak positions, mechanical and tribological properties of the coatings. The G peak shifted toward a lower position with N and Ti doping. The DLC coating deposited with 1 sccm N 2 flow rate showed the lowest G peak position and the smoothest surface. The surface energies of the pure carbon and Ti-doped DLC coatings were lower than that of the N-doped DLC, which was more significant at a higher N 2 flow rate. In terms of adhesion and friction coefficient, it was observed that the Ti-doped DLC coating had the best performance. Ti incorporated in the DLC coating decreased the residual stress of the coating, which improved the adhesive strength of the coating with the Si substrate.

Over the past decade, the demand for high-performance wearable sensors has increased because of their capability for interaction with humans. Such sensors have typically been prepared on conventional substrates, such as silicon, PDMS, and copper mesh. In this work, we propose a class of wearable sensors fabricated from reduced graphene oxide (rGO) patterned paper substrates (rGO-paper). These rGO-paper sensors are highly sensitive to various deformations and capable of measuring bending and folding angles as small as 0.2° and 0.1°, respectively. We have demonstrated the applicability of these high-performance rGO-paper sensors by patterning rGO on kirigamis that can detect pulse and the motion of knees, wrists, and fingers. Finally, paper rings lined with rGO sensors were used to control a robotic hand, and an rGO-paper keyboard was used to light LEDs.

Micro-hot-embossing is an emerging technology with great potential to form micro-and nano-scale patterns into polymers with high throughput and low cost. Despite its rapid progress, there are still challenges when this technology is employed, as demolding stress is usually very high due to large friction and adhesive forces induced during the process. Surface forces are dominating parameters in micro-and nano-fabrication technologies because of a high surface-to-volume ratio of products. This work attempted to improve the surface properties of Si micro-molds by means of silicon-and nitrogen-doped diamond-like carbon (Si-N-DLC) coatings deposited by dc magnetron cosputtering on the molds. The bonding structure, surface roughness, surface energy, adhesive strength and tribological behavior of the coated samples were characterized with micro Raman spectroscopy, atomic force microscopy (AFM), contact angle measurement, microscratch test and ball-on-disk sliding tribological test, respectively. It was observed that the doping condition had a great effect on the performance of the coatings. The SiN -DLC coating deposited with 5 × 10 −6 m 3 min −1 N 2 had lowest surface roughness and energy of about 1.2 nm and 38.2 × 10 −3 N m −1 , respectively, while the coatings deposited with 20 × 10 −6 and 25 × 10 −6 m 3 min −1 N 2 showed lowest friction coefficients. The uncoated and SiN -DLC-coated Si micro-molds were tested in a micro-hot-embossing process for a comparative study of their replication performance and lifetime. The experimental results showed that the performance of the Si micro-molds was improved by the SiN -DLC coatings, and well-defined micro-features with a height of about 100 μm were fabricated successfully into cyclic olefin copolymer (COC) sheets using the SiN -DLC-coated micro-molds.

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NVX-108 caused an increase in PbtO2 following CCI-TBI in rats and should be evaluated further as a possible immediate treatment for TBI.

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