Dependence of RF power on the phase transformation for boron nitride films deposited on graphite at room temperature

Yang, Xiaoqing; Li, Hongdong; Li, Yingai; Lu, Xin; Gao, Shiyong; Zhu, Pinwen; Zhang, Qing; Zhang, Tiechen; Zou, Guangtian

doi:10.1016/j.jcrysgro.2009.04.041

Cited by 9 publications

(10 citation statements)

References 29 publications

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“…We have previously reported that MS is an attractive technique for the synthesis of cBN and oBN-phase-rich films on graphite [18]. It was demonstrated that rf power plays an important role in the phase transformation between oBN and cBN.…”

Section: Resultsmentioning

confidence: 99%

Synthesis and optical properties of purified translucent, orthorhombic boron nitride films

Yang

et al. 2010

Journal of Crystal Growth

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Section: Resultsmentioning

confidence: 99%

Synthesis and optical properties of purified translucent, orthorhombic boron nitride films

Yang

et al. 2010

Journal of Crystal Growth

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“…The RF power was 250 W. The deposition time for all samples was 70 min. The pressure, applied RF power, and gas composition are the most important parameters in the RF sputtering process [3,6].…”

Section: Methodsmentioning

confidence: 99%

“…A BN thin film with nano-metric thickness has high transparency [1][2][3][4][5][6][7][8]. A UV-Vis spectrophotometer was used for the transmittance and absorbance measurements.…”

Section: Figure 3 Afm Images Of the Deposited Layersmentioning

confidence: 99%

“…BN is used as a III-V compound. BN layers are used for high-temperature dielectrics, electron field emitters, coatings for tribological applications, and interfacial layers for optoelectronic devices [4][5][6]. However, the synthesis of high quality BN films is generally implemented at relatively high temperatures that are marginally compatible with solar cell manufacture [7][8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

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Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method

Pat¹

2016

AUBTD-A

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In this study, the influence of N2 gas concentration on the surface and optical properties of BN thin films was investigated. A cubic BN phase, from the hexagonal structure, was produced by nitrogen changing during the deposition process. All BN thin films were deposited on glass substrates by the reactive radio frequency magnetron sputtering method with argon / nitrogen (ratios of 3:7, 1:1 and 4:1) gas mixtures. For the determination of the surface and optical properties of these two phases, field emission scanning electron microscopy, wavelength dispersive x-ray spectroscopy, atomic force microscopy, UV-Vis spectrophotometry, tensiometry, and interferometry tools were used. According to the results, the deposited films are homogeneous, compact nano-structured, and hydrophobic. Perfect stoichiometric ratios were obtained for the deposited samples. Phase transitions to cubic phase from hexagonal BN crystal system were only obtained by N2 gas concentration.Keywords: Nano-thick BN layer; Cubic BN; Hexagonal BN; Surface properties; Optical properties RF SIÇRATMA METODU İLE DEPOLANMIŞ KÜBİK VE HEGZAGONAL BN NANO TABAKALANDIRILMIŞ İNCE FİLMLERİN YÜZEY VE OPTİKSEL ÖZELLİKLERINE AZOT ETKİSİ ÖZETBu çalışmada, BN ince filmlerin yüzey ve optiksel özelliklerine N2 gaz konsantrasyonunun etkisi araştırılmıştır. Hegzagonal yapıdan kubik BN fazı, depolama esnasında azot gazı konsantrasyonu değişimi ile üretilmiştir. Tüm BN ince filmler reaktif radyo frekans manyetik sıçratma metodu kullanarak argon/azot (3:7, 1:1 ve 4:1 oranlarında) gaz karışımlarıyla cam alt taşlar üzerine üretilmişlerdir. Bu iki fazın yüzey ve optiksel özelliklerinin belirlenmesi için, dalgaboyu dağılım X-ışın spektroskopisi, atomik kuvvet mikroskobu, UV-Vis spektrofotometre, tensiyometre ve interferometre ölçüm cihazları kullanılmıştır. Sonuçlara göre, depolanmış ince filmler homojen, sıkı yapılı, nano yapılı ve hidrofobiktir. Mükemmel sitokiyometrik oranlar depolanmış örneklerde elde edilmiştir. Hegzagonal BN kristal sistemden kubik faza geçiş N2 gaz konsantrasyonunun değişimi ile elde edilmiştir.

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“…Boron nitride material is a dry lubricant with excellent properties, which can be altered with respect to the crystal morphology. BN layers were applied in electron-field emitters, high-temperature dielectrics, tribological devices, and optoelectronic systems [19][20][21]. BN material can be also used in solar cell industry as it can be implemented at high temperature [22][23][24][25].…”

Section: Boron Nitride (Bn) Thin Filmsmentioning

confidence: 99%

A brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films

2018

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A great part of interest has been paid for fabricating new materials with novel mechanical, optical, and electrical properties. Boron carbon nitride (BCN) ternary system was applied for variable bandgap semiconductors and systems with extreme hardness. The purpose of this literature review is to provide a brief historical overview of B 4 C and BN, to review recent research trends in the BCN synthesizes, and to summarize the fabrication of BCN thin films by plasma sputtering technique from B 4 C and BN targets in different gas atmospheres. Pre-set criteria are used to discuss the processing parameters affecting BCN performance which includes the gasses flow ratio and effect of temperature. Moreover, many characterization studies such as mechanical, etching, optical, photoluminescence, XPS, and corrosion studies of the RF sputtered BCN thin films are also covered. We further mentioned the application of BCN thin films to enhance the electrical properties of metal-insulator-metal (MIM) devices according to a previous report of Prakash et al. (Opt. Lett. 41, 4249, 2016).

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Dependence of RF power on the phase transformation for boron nitride films deposited on graphite at room temperature

Cited by 9 publications

References 29 publications

Synthesis and optical properties of purified translucent, orthorhombic boron nitride films

Synthesis and optical properties of purified translucent, orthorhombic boron nitride films

Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method

A brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films

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