2013
DOI: 10.1109/jlt.2013.2285304
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Demonstration of Wafer Scale Fabrication of 3-D Stacked Transmitter and Receiver Modules for Optical Interconnects

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Cited by 17 publications
(5 citation statements)
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“…The testing results, together with performance of SFP+ own transmitter, acting as a reference, are shown in Fig.15. The deviation of the receiver sensitivity when operating the 11 VCSEL channels is 1.0 dB, with the worst performance associated with the side channels (10,11). This may be due to the small variations in the ohmic resistance after the compression bonding of the VCSELs, which may have resulted from non-uniform force at the edges.…”
Section: A Transmitter Testingmentioning
confidence: 99%
See 1 more Smart Citation
“…The testing results, together with performance of SFP+ own transmitter, acting as a reference, are shown in Fig.15. The deviation of the receiver sensitivity when operating the 11 VCSEL channels is 1.0 dB, with the worst performance associated with the side channels (10,11). This may be due to the small variations in the ohmic resistance after the compression bonding of the VCSELs, which may have resulted from non-uniform force at the edges.…”
Section: A Transmitter Testingmentioning
confidence: 99%
“…Three dimensional (3D) stacking is an effective way to get short connection and high bandwidth density, and it can be achieved by reflow of thick photoresist on wafer scale [11]. However, the thermal coupling between CMOS and optoelectronics becomes a serious issue.…”
Section: Introductionmentioning
confidence: 99%
“…This approach enables individual functions, for example, configurable logic, memory, and serial transceivers to be fabricated using optimized processes before final integration, as well as reducing overall costs through reduced individual die area. An alternative to the interposer approach is to attach photonic transceivers directly to the CMOS chip in a 3-D arrangement [114]. Ultimately this offers minimum interconnect delays between circuit elements and maximum bandwidth between layers but is challenging due to thermal, stress, and reliability issues and requires new methods for testing.…”
Section: A Photonic Integrationmentioning
confidence: 99%
“…In packaging solutions, 3D stacking is the best way to achieve highest bandwidth density and short connections [10]. Also the reflowing of photoresist has been demonstrated as a bridge for connecting traces at a low cost process [11]. However, when stacking dies, thermal removal becomes a big issue [12,13].…”
Section: Introductionmentioning
confidence: 99%