2020
DOI: 10.1002/jsid.963
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Deformation‐induced stress/strain mapping and performance evaluation of a‐IGZO thin‐film transistors for flexible electronic applications

Abstract: In the flexible electronics sector, there is an urgent need for higher performance, and hence, many new technologies are emerging in recent years. The field of organic and printed electronics allows low production costs and large areas. The silicon technology allows nanometric resolutions and better performance. A new technology CAD (TCAD)‐based design methodology is needed to combine both mechanical flexibility and high performance. This work presents a predictive TCAD calibration methodology for indium‐galli… Show more

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Cited by 4 publications
(2 citation statements)
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References 31 publications
(35 reference statements)
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“…In addition to efforts to integrate flexible device models into SPICE, other studies have been done to simulate the mechanical deformations of devices and the related variation of electrical properties. In [251] both the biaxial and uniaxial bending stresses in polysilicon TFTs using process conditions like thermal mismatch among materials have been modeled, in [252] a framework based on the nonlinear finite element technique for obtaining stress/strain mapping from the deformation gradient for isotropic materials is developed, that in [253] has been applied to flexible electronics application. In [254] a simulation approach for evaluating the performance of arbitrarily deformed flexible electronic components is presented, that exploits a computer graphic method for three-dimensional object manipulation.…”
Section: Required Features Of Design Toolsmentioning
confidence: 99%
“…In addition to efforts to integrate flexible device models into SPICE, other studies have been done to simulate the mechanical deformations of devices and the related variation of electrical properties. In [251] both the biaxial and uniaxial bending stresses in polysilicon TFTs using process conditions like thermal mismatch among materials have been modeled, in [252] a framework based on the nonlinear finite element technique for obtaining stress/strain mapping from the deformation gradient for isotropic materials is developed, that in [253] has been applied to flexible electronics application. In [254] a simulation approach for evaluating the performance of arbitrarily deformed flexible electronic components is presented, that exploits a computer graphic method for three-dimensional object manipulation.…”
Section: Required Features Of Design Toolsmentioning
confidence: 99%
“…For cut-off frequency (f T ) that indicates the maximum speed of the device, TFTs are still orders of magnitudes lower than CMOS. For advanced devices, f T = 63.6 GHz is reported for p-Si TFT [48], 690 MHz for flexible IGZO TFT [49], 20 MHz for flexible organic TFT [50], while the sub 5 nm node CMOS could have 400 GHz [51]. f T of a field-effect transistor at the saturation region can be roughly characterized as follows [50]:…”
Section: Characteristics Of Tft Devicesmentioning
confidence: 99%