“…A long time annealing and a suitable thickness of AlN buffer layer are very important to the growth of high quality GaN epilayers. Besides the growth condition of low-temperature AlN buffer layer, the V/III ratio in the initial growth stage has an important influence on the quality of a GaN epilayer grown by MOCVD, and the quality of GaN epilayer could be improved by employing a lower V/III ratio in the initial growth stage and intentionally prolonging the island coalescence process (Zhao et al, 2007b(Zhao et al, , 2009a. After optimizing the growth conditions, high-mobility MOCVDgrown n-type GaN films of about 4 m in thickness were reported (Zhao et al, 2006a).…”