2009
DOI: 10.1016/j.jallcom.2009.07.147
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Defect evolution and accompanied change of electrical properties during the GaN growth by metalorganic chemical vapor deposition

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Cited by 10 publications
(2 citation statements)
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“…A long time annealing and a suitable thickness of AlN buffer layer are very important to the growth of high quality GaN epilayers. Besides the growth condition of low-temperature AlN buffer layer, the V/III ratio in the initial growth stage has an important influence on the quality of a GaN epilayer grown by MOCVD, and the quality of GaN epilayer could be improved by employing a lower V/III ratio in the initial growth stage and intentionally prolonging the island coalescence process (Zhao et al, 2007b(Zhao et al, , 2009a. After optimizing the growth conditions, high-mobility MOCVDgrown n-type GaN films of about 4 m in thickness were reported (Zhao et al, 2006a).…”
Section: Samplesmentioning
confidence: 99%
“…A long time annealing and a suitable thickness of AlN buffer layer are very important to the growth of high quality GaN epilayers. Besides the growth condition of low-temperature AlN buffer layer, the V/III ratio in the initial growth stage has an important influence on the quality of a GaN epilayer grown by MOCVD, and the quality of GaN epilayer could be improved by employing a lower V/III ratio in the initial growth stage and intentionally prolonging the island coalescence process (Zhao et al, 2007b(Zhao et al, , 2009a. After optimizing the growth conditions, high-mobility MOCVDgrown n-type GaN films of about 4 m in thickness were reported (Zhao et al, 2006a).…”
Section: Samplesmentioning
confidence: 99%
“…For example, the revolution in semiconductor industry is due to the realization of control and use of defects, e.g. n-type and p-type doping semiconductor materials have been used in LED chips for solid state lighting [6]. Defects controlling and mechanical properties improvement in alloys can be realized by adjusting the parameters during the semi-solid metal (SSM) forming processes [7].…”
Section: Introductionmentioning
confidence: 99%