Deep X-Ray Lithography in the Fabrication Process of a 3D Diffractive Optical Element

Heussler, S. P.; Moser, H. O.; Quan, C. G.; Tay, Cho Jui; Moeller, K.; Bahou, Mohammed; Jian, L. K.

doi:10.1063/1.2436350

Cited by 3 publications

(2 citation statements)

References 2 publications

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“…Figure 3 shows a resonance curve and a picture of such an EM 3 at 187 THz that is close to the 193 THz that correspond to 1.55 Pm wavelength used in fiber optical telecommunication. Another example is the development of an infrared diffractive optical element (DOE) [7] that aims at setting up a fast parallel-processing infrared Fourier transform interferometer. Intended applications include high-bandwidth non-periodic phenomena like explosions or combustion processes that are not readily amenable to standard Fourier transform interferometers that usually feature mechanically scanning mirrors.…”

Section: Examples Of Micro-nanomanufacturingmentioning

confidence: 99%

X-ray-based Micro/Nanomanufacturing at SSLS — Technology and Applications

Jian¹,

Casse²,

Heussler³

et al. 2007

AIP Conference Proceedings

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Section: Examples Of Micro-nanomanufacturingmentioning

confidence: 99%

X-ray-based Micro/Nanomanufacturing at SSLS — Technology and Applications

Jian¹,

Casse²,

Heussler³

et al. 2007

AIP Conference Proceedings

Self Cite

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“…In addition, with a line photo-detector array, stationary FT spectrometers are capable of quasi-real-time processing and are applicable to timeresolved spectroscopy for short-time transient phenomena. Miniaturized versions of stationary FT spectrometers have also been reported [10][11][12].…”

Section: Introductionmentioning

confidence: 99%

A micromachined stationary lamellar grating interferometer for Fourier transform spectroscopy

Chau

Zhou

2008

J. Micromech. Microeng.

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This paper reports a novel micromachined stationary lamellar grating interferometer for Fourier transform (FT) based spectroscopy applications. The interferometer employs a set of tilted interdigitated light reflecting beams to produce an interferogram with spatially varying optical path difference (OPD) recorded by a line photodetector array. Due to the advantages including robustness and the absence of mechanical moving parts and optical beam splitters, the proposed spectrometer may be built in a relatively small volume and with moderate cost for wide-band radiation spectra measurement, fast time-resolved spectroscopy and for field use. The proposed stationary lamellar grating FT spectrometer was implemented using a silicon-on-insulator (SOI) micromachining process. The prototype spectrometer demonstrated a full width at half maximum (FWHM) spectral resolution of 2 nm at a wavelength of 532 nm and of 2.6 nm at 632.8 nm.

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