2014
DOI: 10.1117/12.2046147
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Decomposition-aware layout optimization for 20/14nm standard cells

Abstract: Decomposition-aware layout design improvements for 8, 9, 11, and 13-track 20/14nm standard cells are presented. Using a decomposition-aware scoring methodology that quantifies the manufacturability of layouts, the Double Patterning Technology (DPT)-compliant layouts are optimized for DPT-specific metrics that include: the density difference between the two decomposition mask layers, the enclosure of stitching areas, the density of stitches, and the design regularity of stitching areas. For a 9-track standard c… Show more

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Cited by 3 publications
(2 citation statements)
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“…The DFM Pattern-based Optimizations (DFM-POP) provides automated design layout pattern correction based on context-aware patterns [5], enables early detection and fixing (repair by construction) of DRC+ into the in-design flow (Place and Route), with negligible physical or timing impacts during physical synthesis [2]. While all these methodologies improve the manufacturability of the design (fig.…”
Section: Auto-fixing Methodologies For Mas Scoringmentioning
confidence: 99%
“…The DFM Pattern-based Optimizations (DFM-POP) provides automated design layout pattern correction based on context-aware patterns [5], enables early detection and fixing (repair by construction) of DRC+ into the in-design flow (Place and Route), with negligible physical or timing impacts during physical synthesis [2]. While all these methodologies improve the manufacturability of the design (fig.…”
Section: Auto-fixing Methodologies For Mas Scoringmentioning
confidence: 99%
“…Manufacturability Analysis and Scoring (MAS) is a well established DFM check that has been introduced for advanced semiconductor technology nodes <=55nm [1,2,3]. The deck analyzes designs for the usage of minimum ground rules.…”
Section: Introductionmentioning
confidence: 99%