Decay of the first triplet Ne2 excimer in the presence of O2

Manzanares, E. R.; Firestone, R. F.

doi:10.1063/1.443562

Cited by 6 publications

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References 27 publications

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“…For pulsed excitation, the observed changes in the pulse shape are broadly consistent with the expected time-dependence of the triplet state population density [Ne * 2 1 u ( 3 P 2 ) low v ] (from which the 84 nm output is mostly derived). This is essentially determined by the pressure dependent production rate from equation ( 1) and the overall decay rate of the triplet state via equations ( 3) and (4), as previously discussed [22,40]:…”

Section: Time Evolution Of Euv/visible Outputmentioning

confidence: 99%

Enhanced performance of an EUV light source (λ = 84 nm) using short-pulse excitation of a windowless dielectric barrier discharge in neon

Carman¹,

Kane²,

Ward³

2009

J. Phys. D: Appl. Phys.

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The electrical and optical characteristics of a dielectric barrier discharge (DBD) based neon excimer lamp generating output in the extreme ultraviolet (EUV) spectral range (λ = 84 nm) have been investigated experimentally. We report a detailed comparison of lamp performance for both pulsed and sinusoidal voltage excitation waveforms, using otherwise identical operating conditions. The results show that pulsed voltage excitation yields a ∼50% increase in the overall electrical to EUV conversion efficiency compared with sinusoidal waveforms, when operating in the pressure range 500–900 mbar. Pulsed operation allows greater control of parameters associated with the temporal evolution of the EUV pulse shapes (risetime, instantaneous peak power). The Ne DBD based source is also found to be highly monochromatic with respect to its spectral output from the second continuum band at λ ∼ 84 nm (5 nm FWHM). This continuum band dominates the spectral emission over the wavelength range 30–550 nm. Lamp performance; as measured by the overall EUV output energy, electrical to EUV conversion efficiency and spectral purity at λ ∼ 84 nm; improves with increasing gas pressure up to p = 900 mbar.

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Section: Time Evolution Of Euv/visible Outputmentioning

confidence: 99%

Enhanced performance of an EUV light source (λ = 84 nm) using short-pulse excitation of a windowless dielectric barrier discharge in neon

Carman¹,

Kane²,

Ward³

2009

J. Phys. D: Appl. Phys.

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Mechanism for the decay of Ar(3P2) atoms in pure argon. Reconciliation of low pressure and high pressure values for the decay constant

Manzanares

Firestone

1983

The Journal of Chemical Physics

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A new set of decay constant values for Ar(3P2) in pure argon at 298 K determined by means of single frequency cw laser probe spectrophotometry in the 100–700 Torr region is reported. An excimer forming mechanism initiated by a reversible termolecular step and carried forward by a sequence of reversible collisional relaxation stages with provision for radiative decay at each stage is proposed to account for the kinetic behavior of Paschen-1s atoms. It is demonstrated that this mechanism is quantitatively consistent with measured collisional decay constant values at pressures in the 0–22 and 100–700 Torr regions and that adherence of such values to form, k3P2=AP2+BP, is fortuitous and that the values of A and B have no mechanistic significance. It is similarly indicated that the nature of the probable decay mechanism precludes the possibility of recovering excited atom precursor decay constant values by analysis of excimer emission and absorption data without detailed numerical modeling.

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