Enhanced performance of an EUV light source (λ = 84 nm) using short-pulse excitation of a windowless dielectric barrier discharge in neon

Abstract

The electrical and optical characteristics of a dielectric barrier discharge (DBD) based neon excimer lamp generating output in the extreme ultraviolet (EUV) spectral range (λ = 84 nm) have been investigated experimentally. We report a detailed comparison of lamp performance for both pulsed and sinusoidal voltage excitation waveforms, using otherwise identical operating conditions. The results show that pulsed voltage excitation yields a ∼50% increase in the overall electrical to EUV conversion efficiency compared with sinusoidal waveforms, when operating in the pressure range 500–900 mbar. Pulsed operation allows greater control of parameters associated with the temporal evolution of the EUV pulse shapes (risetime, instantaneous peak power). The Ne DBD based source is also found to be highly monochromatic with respect to its spectral output from the second continuum band at λ ∼ 84 nm (5 nm FWHM). This continuum band dominates the spectral emission over the wavelength range 30–550 nm. Lamp performance; as measured by the overall EUV output energy, electrical to EUV conversion efficiency and spectral purity at λ ∼ 84 nm; improves with increasing gas pressure up to p = 900 mbar.

Recent Progress of Plasma-Assisted Nitrogen Fixation Research: A Review

“…Similar with the H-B process, the selection of catalysts is the key in plasma-catalysis for nitrogen fixation, and a large amount of work on catalysts screening is needed in future research. Besides, pulsed energization has proven to be beneficial to many plasma processes [150,[168][169][170]. Using high frequency, nanosecond pulsing for plasma generation could potentially optimize the energy efficiency and yield of the plasma-assisted nitrogen fixation process.…”

Electric and spectroscopic analysis of a pure nitrogen mono-filamentary dielectric barrier discharge (MF-DBD) at 760 Torr

“…Some of these applications concern photo-chemical treatment of water [Azrague K et al 2005, Gonzalez et al 2004, volatile organic compound (VOC) remediation [Biomorgi J et al 2005, Koutsospyros A et al 2004, biochemical decontamination and remediation of toxic gases [Herrman H W et al 1999], realisation of non-coherent vacuum ultraviolet (VUV: 100 nm < λ < 200 nm) or ultraviolet (UV: 200 nm < λ < 400 nm) sources [Kurunczi P et al 1999, Masoud N et al 2004, material deposition [Babayan S E et al 1998], H 2 generation for fuel cells and diesel reforming [Qiu H et al 2004, exhaust treatment [Dietz et al 2004] … As far as non-coherent radiation DBD sources are concerned, VUV sources are of topical interest for a variety of industrial purposes such as plasma processing [Kogelschatz U et al 1999], surface cleaning [Korfatis G et al 2002] and modification [Wagner H-E et al 2003, Borcia G et al 2003, sterilization, decontamination and medical care. Recently some emerging scientific investigations were performed in neon [Carman R J et al 2010]. Rare gas DBDs can be used for excilamps Boyd I W 2000, Boichenko A M et al 2004], mercury-free lamps [Jinno et al 2005], for oxidation of silicon at 250 °C [Kogelschatz U et al 2000].…”

“…Rare gas DBDs can be used for excilamps Boyd I W 2000, Boichenko A M et al 2004], mercury-free lamps [Jinno et al 2005], for oxidation of silicon at 250 °C [Kogelschatz U et al 2000]. Operating in xenon or neon, they produce VUV or EUV (10 nm < λ < 100 nm) emissions with an efficiency as high as 50 to 60% [Vollkommer F and Hitzschke L 1996, Hitzschke L and Vollkommer F 2001, Mildren R P and Carman R J 2001, Carman R J and Mildren R P 2003, Carman R J et al 2004, Merbahi N et al 2007, Carman R J et al 2010. In order to understand their behaviour, stable MF-DBDs were must be achieved at frequencies around tens of kilohertz [Adler F and Muller S 2000, Sewraj N et al 2009, Merbahi N et al 2004, Merbahi N et al 2010.…”

Subnanosecond breakdown development in high-voltage pulse discharge: Effect of secondary electron emission

“…Practically, the focus on this issue is connected with a necessity and possibility of developing novel electrophysical devices, such as low-and high-energy electron beam sources, e.g. those for laser excitation and modification of materials, radiation sources, including x-ray radiation, high-pressure discharge pre-ionization devices, high-voltage subnanosecond and picosecond pulse generation and commutation devices to be used in systems of various purposes [3][4][5][6].…”