Debris reduction for copper and diamond-like carbon thin films produced by magnetically guided pulsed laser deposition

Tsui, Ying Y.; Minami, H.; Vick, D.; Fedosejevs, R.

doi:10.1116/1.1467664

Cited by 17 publications

(17 citation statements)

References 14 publications

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“…The plasma reduces laser-surface coupling by absorbing and reflecting a significant part of ablating laser pulse if its duration is longer than the time of plasma formation. Because of this fundamental reason, reduction of the LPP shielding effect is among the major approaches for improvement of the laser-surface coupling for nanosecond pulses [5][6][7][8][9][10][11][12]. Steady magnetic field [8][9][10][11][12][13][14][15][16][17][18][19]21], ablation under vacuum conditions [7,20], and dc electric field [21,22] are employed to remove the LPP from a laser beam, to confine LPP to a smaller volume, or to lower plasma density.…”

Section: Introductionmentioning

confidence: 99%

Fundamental mechanisms of nanosecond-laser-ablation enhancement by an axial magnetic field

2019

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Steady magnetic field perpendicular to laser beam is widely used to improve rate and quality of laser ablation. Recently we reported a 69-fold enhancement of laser ablation of silicon by magnetic field parallel to laser beam. To understand the fundamental mechanisms of that phenomenon, multi-pulse magnetic-field-enhanced ablation of stainless steel, titanium alloy, and silicon was performed. The influence of the magnetic field significantly varies depending on the material: from 2.8-fold ablation enhancement on stainless-steel and silicon to no pronounced ablation modification on titanium alloy. Those results are discussed in terms of magnetized-plasma, magneto-absorption, skin-layer, and magnetic-field-influenced transport effects. Understanding of those mechanisms is crucial for advanced controlling of nanosecond laser-surface coupling to improve laser micromachining.

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Section: Introductionmentioning

confidence: 99%

Fundamental mechanisms of nanosecond-laser-ablation enhancement by an axial magnetic field

2019

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“…6 We report the controlling of laser-produced tin plasma using a moderate magnetic field of 0.64 T. The presence of a magnetic field ͑B͒ during the expansion of a laser-produced plasma may initiate several interesting physical phenomena which includes conversion of the plasma thermal energy into kinetic energy, plume confinement, ion acceleration, emission enhancement, plasma instabilities, etc. [8][9][10] Tsui et al 11 demonstrated the effectiveness of debris reduction using magnetically guided pulsed laser deposition. Time-of-flight emission spectroscopy is used to study the flight time and velocity of the singly ionized tin ͑Sn + ͒ and neutral tin ͑Sn͒ species at various spatial points in the plasma.…”

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confidence: 99%

Debris mitigation in a laser-produced tin plume using a magnetic field

Harilal¹,

O'Shay²,

Tillack³

2005

Journal of Applied Physics

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Debris mitigation in a laser-produced tin plume is one of the most important issues for its use as an extreme ultraviolet source in next generation lithography. We investigated the use of a magnetic field for controlling the kinetic energies of various species in a laser-produced tin plasma. 1.06 m, 8-ns pulses from a Nd:yttrium aluminum garnet laser were used to create the tin plasma in vacuum that expanded across a transverse magnetic field. Time-of-flight optical emission spectroscopy was used to measure the velocities of excited neutral and singly ionized tin species. Our studies showed a significant reduction in the kinetic energies of the plume species with a modest magnetic field of 0.64 T.

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“…Also it has been reported that droplet-free thin films can be fabricated with the use of a B-field in PLD (Tsui et al, 2002).…”

Section: Introductionmentioning

confidence: 99%

Collimation of laser-produced plasmas using axial magnetic field

Roy¹,

Harilal²,

Hassan³

et al. 2015

Laser Part. Beams

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We investigated the expansion dynamics of laser-produced plasmas expanding into an axial magnetic field. Plasmas were generated by focusing 1.064 μm Nd:YAG laser pulses onto a planar tin target in vacuum and allowed to expand into a 0.5 T magnetic field where the field lines were aligned along the plume expansion direction. Gated images employing an intensified charge-coupled device showed focusing of the plasma plume, which were also compared with results, obtained using particle-in-cell modeling methods. The estimated density and temperature of the plasma plumes employing emission spectroscopy revealed significant changes in the presence and absence of the 0.5 T magnetic field. In the presence of the field, the electron temperature is increased with distance from the target, while the density showed opposite effects.

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Debris reduction for copper and diamond-like carbon thin films produced by magnetically guided pulsed laser deposition

Abstract: Amorphous diamond-like carbon film prepared by pulsed laser deposition with application of pulsed negative bias voltage High intensity femtosecond laser deposition of diamond-like carbon thin films

Cited by 17 publications

References 14 publications

Fundamental mechanisms of nanosecond-laser-ablation enhancement by an axial magnetic field

Fundamental mechanisms of nanosecond-laser-ablation enhancement by an axial magnetic field

Debris mitigation in a laser-produced tin plume using a magnetic field

Collimation of laser-produced plasmas using axial magnetic field

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