Debris mitigation in a laser-produced tin plume using a magnetic field

Harilal, S. S.; O'Shay, B; Tillack, M. S.

doi:10.1063/1.1999851

Cited by 51 publications

(28 citation statements)

References 16 publications

(17 reference statements)

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“…The debris includes fast ions and neutrals, clusters, and out of band emission and, hence, controlling the expanding plume species is indeed a greatest challenge for future LPP EUV light source. We employed various methods for controlling and/or mitigating energetic ions including; low-density targets, 4,17 ambient gas, 16 magnetic field, 18 pre-pulse 2 and synergetic effects ͑combina-tion of two methods͒. 16 We recently reported that the spot size has negligible effect on the conversion efficiency ͑CE͒ of in-band radiation ͑13.5 nm with 2% bandwidth͒.…”

Section: Introductionmentioning

confidence: 99%

Influence of spot size on propagation dynamics of laser-produced tin plasma

Harilal¹

2007

Journal of Applied Physics

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The plume dynamics in the presence of an ambient gas is very intriguing physics. The expansion of a laser-produced plasma in the presence of an ambient gas leads to internal plume structures, plume splitting, sharpening, confinement, etc. We investigated propagation dynamics of an expanding tin plume for various spot sizes using a fast visible plume imaging and Faraday cup diagnostic tools. Our results indicate that the sharpening of the plume depends strongly on the spot size. With a smaller spot size, the lateral expansion is found to be higher and the plume expansion is spherical while with a larger spot size the plume expansion is more cylindrical. Analysis of time resolved imaging also showed internal structures inside the plume.

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Section: Introductionmentioning

confidence: 99%

Influence of spot size on propagation dynamics of laser-produced tin plasma

Harilal¹

2007

Journal of Applied Physics

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“…In an EUVL tool, the collector mirror is expected to be placed ϳ15-20 cm from the plasma source. For industrializing EUVL, a lifetime of more than 10 9 shots is needed for the collector mirror. So controlling the debris from laser plasma is the most important task for creating a clean photon source for EUVL.…”

Section: Introductionmentioning

confidence: 99%

Ambient gas effects on the dynamics of laser-produced tin plume expansion

Harilal¹,

O'Shay²,

Tao³

et al. 2006

Journal of Applied Physics

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119

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Controlling the debris from a laser-generated tin plume is one of the prime issues in the development of an extreme ultraviolet lithographic light source. An ambient gas that is transparent to 13.5 nm radiation can be used for controlling highly energetic particles from the tin plume. We employed a partial ambient argon pressure for decelerating various species in the tin plume. The kinetic energy distributions of tin species were analyzed at short and large distances using time and space resolved optical emission spectroscopy and a Faraday cup, respectively. A fast-gated intensified charged coupled device was used for understanding the hydrodynamics of the plume's expansion into argon ambient. Our results indicate that the tin ions can be effectively mitigated with a partial argon pressure ϳ65 mTorr. Apart from thermalization and deceleration of plume species, the addition of ambient gas leads to other events such as double peak formation in the temporal distributions and ambient plasma formation.

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“…The normalized radial wave functions derived from the use of the invariant operator are represented as Equation (27) with Equations (22) and (28). An interesting mathematical feature in this case is that the quantum solutions are expressed in terms of the complex classical solutions of Equation (9).…”

Section: Resultsmentioning

confidence: 99%

“…We can see that angular momentum of the particle is conserved in variable magnetic fields as well as in the static limit [7]. Several interesting phenomena that take place by the presence of magnetic field in an ionized plasma include plume confinement, particle acceleration and deceleration, dissipation of kinetic energy into thermal energy, Debris mitigation, and instability of plasma [8][9][10].…”

Section: Hamiltonian Dynamicsmentioning

confidence: 98%

Quantum features of a charged particle in ionized plasma controlled by a time-dependent magnetic field

Choi

Maamache

2014

Front. Phys.

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Quantum characteristics of a charged particle traveling under the influence of an external time-dependent magnetic field in ionized plasma are investigated using the invariant operator method. The Hamiltonian that gives the radial part of the classical equation of motion for the charged particle is dependent on time. The corresponding invariant operator that satisfies Liouville-von Neumann equation is constructed using fundamental relations. The exact radial wave functions are derived by taking advantage of the eigenstates of the invariant operator. Quantum properties of the system is studied using these wave functions. Especially, the time behavior of the radial component of the quantized energy is addressed in detail.

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Debris mitigation in a laser-produced tin plume using a magnetic field

Cited by 51 publications

References 16 publications

Influence of spot size on propagation dynamics of laser-produced tin plasma

Influence of spot size on propagation dynamics of laser-produced tin plasma

Ambient gas effects on the dynamics of laser-produced tin plume expansion

Quantum features of a charged particle in ionized plasma controlled by a time-dependent magnetic field

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