2007
DOI: 10.1016/j.diamond.2006.11.073
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DC plasma enhanced growth of oriented carbon nanowall films by HFCVD

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Cited by 36 publications
(19 citation statements)
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“…Wu et al reported that they synthesize carbon nanowalls by microwave plasma CVD [12]. Dikonimos et al grown carbon nanowalls in a hot filament CVD reactor on Si substrate [13]. Marcel et al fabricated carbon nanowalls by atmospheric direct-current plasma enhanced CVD method [14].…”
Section: Introductionmentioning
confidence: 99%
“…Wu et al reported that they synthesize carbon nanowalls by microwave plasma CVD [12]. Dikonimos et al grown carbon nanowalls in a hot filament CVD reactor on Si substrate [13]. Marcel et al fabricated carbon nanowalls by atmospheric direct-current plasma enhanced CVD method [14].…”
Section: Introductionmentioning
confidence: 99%
“…PECVD is a promising candidate for mass production of 2D graphene nanosheets, because of its simplicity and compatibility with traditional semiconductor processes. Moreover it offers a high degree of control 67. Often a traditional catalyst is used as the substrate for their production; however, various reports show pretty much any material can be used, including Si wafers with an oxide surface layer 68.…”
Section: Graphene Synthesismentioning
confidence: 99%
“…Graphene [6][7][8] Carbon nanotube * 3,9 Activated carbon [10][11][12] in nanostructure ordering/patterning [32][33][34][35][36] due to the presence of energetic electrons, excited molecules and atoms, free radicals, photons, and other active species in the plasma region. Compared with T-CVD, PECVD growth is more complex.…”
Section: Propertiesmentioning
confidence: 99%