DC-offset-free homodyne interferometer and its nonlinearity compensation

Hu, Pengcheng; Zhu, Jinghao; Zhai, Xiaoyu; Tan, Jiubin

doi:10.1364/oe.23.008399

Cited by 28 publications

(12 citation statements)

References 13 publications

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“…[4]. Поэтому в настоящее время активно ведутся работы по компенсации нелинейности интерферометров как с помощью численных методовв первую очередь с помощью широко распространенного итерационного алгоритма вычисления параметров эллипса (elliptical least-squares fitting technique) [5], так и аппаратными методами [6][7][8].…”

Section: Introductionunclassified

Гомодинный Квадратурный Интерферометр Перемещений. Моделирование

Леонидович¹,

Вишняков²

2021

Оптика И Спектроскопия

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In this paper, based on the Jones matrix formalism, we describe the optical scheme of a single-pass homodyne displacement interferometer with a quadrature phase detection principle. The interferometer is built according to the Michelson scheme, and polarizing optical elements are used to obtain quadrature signals with a phase shift of 90°. The interferometer is supposed to be used as part of a new Russian standard of the kilogram based on watt balance for precision measurements of the displacement and speed of the coil in the vertical direction. The results of modeling the optical scheme of the interferometer are considered in order to assess the effect on the measurement accuracy of the imperfection of the polarizing elements and their alignment. An algorithm for correction of nonlinearity arising in the quadratic detection of interference signals is also considered. The results of experimental testing of a homodyne displacement interferometer with a quadrature principle of phase registration are carried out.

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Section: Introductionunclassified

Гомодинный Квадратурный Интерферометр Перемещений. Моделирование

Леонидович¹,

Вишняков²

2021

Оптика И Спектроскопия

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“…Therefore, the measurement accuracy of this measurement structure will be affected by the nonlinearity error during the measurement. The formula for the analysis of the nonlinearity error is revealed in Equation 5, where I x and I y are the interferometric signals, ψ represents the ideal phase, and m is a constant [13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement Mirrors

et al. 2020

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Due to the common path structure being insensitive to the environmental disturbances, relevant Fabry–Pérot interferometers have been presented for displacement measurement. However, the discontinuous signal distribution exists in the conventional Fabry–Pérot interferometer. Although a polarized Fabry–Pérot interferometer with low finesse was subsequently proposed, the signal processing is complicated, and the nonlinearity error of sub-micrometer order occurs in this signal. Therefore, a differential quadrature Fabry–Pérot interferometer has been proposed for the first time. In this measurement system, the nonlinearity error can be improved effectively, and the DC offset during the measurement procedure can be eliminated. Furthermore, the proposed system also features rapid and convenient replacing the measurement mirrors to meet the inspection requirement in various measuring ranges. In the comparison result between the commercial and self-developed Fabry–Pérot interferometer, it reveals that the maximum standard deviation is less than 0.120 μm in the whole measuring range of 600 mm. According to these results, the developed differential Fabry–Pérot interferometer is feasible for precise displacement measurement.

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“…The nonlinear error compensation method focuses on the follow-up signal processing. Only the DC offset error and unequal AC amplitude error can be corrected in real time [ 17 ]. The nonorthogonal error compensation algorithm is complex and time-consuming, such that it is difficult to achieve real-time compensation.…”

Section: Introductionmentioning

confidence: 99%

External Modulation Laser Module Assembly for Improving Measurement Performance of Homodyne Interferometry

Zhang

Sun

Zhao

et al. 2020

Sensors

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An external modulation laser module assembly (EMLMA) is proposed to suppress nonlinear errors in an interferometry system and improve its measurement performance. The EMLMA employs both phase modulation with radio frequency signal and a specific modulation amplitude switching mode, enabling the suppression of noise introduced by spurious reflections. The amplitude modulation reduces the influence of stray and background light by transforming the signal of interest to a high-frequency bandwidth. Experimental results show that the measurement error and stability of the interferometry system are significantly improved using the proposed light source module. After modulation, the spurious reflection-induced offset is decreased, and the measurement resolution improves from 7 to 2 nm. The EMLMA can replace the light source of any interferometric measurement system without altering the optical measurement structure. The proposed method reduces the influence of nonlinear errors in homodyne interferometry and provides a basis for further improvement of the interferometry performance.

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DC-offset-free homodyne interferometer and its nonlinearity compensation

Cited by 28 publications

References 13 publications

Гомодинный Квадратурный Интерферометр Перемещений. Моделирование

Гомодинный Квадратурный Интерферометр Перемещений. Моделирование

Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement Mirrors

External Modulation Laser Module Assembly for Improving Measurement Performance of Homodyne Interferometry

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