Damping characteristics of a micromachined piezoelectric diaphragm-based pressure sensor for underwater applications

Tan, Chin Wen; Kottapalli, Ajay Giri Prakash; Wang, Z.H.; Ji, Xiao Na; Miao, Jianmin; Barbastathis, George; Triantafyllou, Michael S.

doi:10.1109/transducers.2011.5969138

Cited by 8 publications

(10 citation statements)

References 9 publications

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“…[30] The sensor was fabricated using MEMS microfabrication processes that included SOI substrate-PZT layer bonding using spin-on cytop polymer, chemical-mechanical-polishing, sputter deposition of the top and bottom electrodes sandwiching the sensing membrane, patterning of the electrode interconnects and pads, wet etching of the PZT layer to contact the bottom electrode, and releasing the diaphragm structure using the anisotropic deep reactive ion etching (DRIE). [38] The 35 mm long whiskers and cylinder were glued on to the piezoelectric membrane using nonconductive epoxy (EPO-TEK H70E) and subsequently cured in a furnace for 90 min at 80 °C. The whisker vibrations caused buckling of the piezoelectric membrane, generating charges at the top and bottom Au electrodes (Figure 5a).…”

Section: Methodsmentioning

confidence: 99%

Undulating Seal Whiskers Evolved Optimal Wavelength‐to‐Diameter Ratio for Efficient Reduction in Vortex‐Induced Vibrations

Kamat,

Zheng,

Bos

et al. 2023

Advanced Science

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Seals are well‐known for their remarkable hydrodynamic trail‐following capabilities made possible by undulating flow‐sensing whiskers that enable the seals to detect fish swimming as far as 180 m away. In this work, the form‐function relationship in the undulating whiskers of two different phocid seal species, viz. harbor and gray seals, is studied. The geometry and material properties of excised harbor and grey seal whiskers are systematically characterized using blue light 3D scanning, optical and scanning electron microscopy, and nanoindentation. The effect of the undulating geometry on the whiskers’ vibration in uniform water flow is studied using both experimental (piezoelectric MEMS and 3D‐printed piezoresistive sensors developed in‐house) and numerical (finite element method) techniques. The results indicate that the dimensionless ratio of undulation wavelength to mean whisker diameter (λ/Dm) in phocid seals may have evolved to be in the optimal range of 4.4–4.6, enabling an order‐of‐magnitude reduction in vortex‐induced vibrations (compared to a similarly‐shaped circular cylinder) and, consequently, an enhanced flow sensing capability with minimal self‐induced noise. The results highlight the importance of the dimensionless λ/Dm ratio in the biomimetic design of seal whisker‐inspired vibration‐resistant structures, such as marine risers and wake detection sensors for submarines.

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Section: Methodsmentioning

confidence: 99%

Undulating Seal Whiskers Evolved Optimal Wavelength‐to‐Diameter Ratio for Efficient Reduction in Vortex‐Induced Vibrations

Kamat,

Zheng,

Bos

et al. 2023

Advanced Science

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“…In the field of MEMS/NEMS sensors, principles of piezoelectric [5][6][7][8][9][10][11][12] and piezoresistive [13][14][15][16][17][18][19] sensing have mostly been exploited to form sensing elements of the sensors. Piezoelectric polymers have been of great interest recently.…”

Section: Piezoelectric Materialsmentioning

confidence: 99%

“…The polymers having a semicrystalline structure like polyvinylidene fluoride (PVDF) [7], parylene-C [8], liquid crystal polymers, and polyamides [6] are known for exhibiting piezoelectric properties. Their principle of operation is similar to that of conventional piezoelectric inorganic materials.…”

Section: Bulk Piezopolymersmentioning

confidence: 99%

Flexible and Wearable Piezoelectric Nanogenerators

Sengupta

Kottapalli

2019

Self-Powered and Soft Polymer MEMS/NEMS Devices

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“…On the other hand, in the bulk acoustic wave sensors (BAW) the vibration wave propagates on the piezoelectric material volume which is often implemented in the form of a micro electromechanical system (MEMS) that is in contact with fluid. The targeted application of most literature on this subject is pressure measurement [15,16,17,18], for very lowforce sensing only a few works focus on high level physical mechanisms [19,20], while other authors focus more on the design of the signal conditioning electronics that use the resonance frequency shift without any attempt to analyze or explain the phenomenon observed on the response of the resonant transducer [21,22]. The novelty of the work presented in this paper is the utilization of a bulk ring-shaped piezoelectric specimen (required by the application) positioned within a mechanical structure to attempt to measure traction and compression static force by means of the resonance operating mode.…”

Section: Introductionmentioning

confidence: 99%

Static force transducer based on resonant piezoelectric structure: root cause investigation

Salaheddine

Bernard

2017

Smart Mater. Struct.

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The aim of this paper is to investigate the design and the integration of a static force sensor based on a resonant bulk acoustic wave piezoelectric transducer. Experimental measurements of the electrical admittance spectrum show its dependence on the applied force. We noticed that the quality of the frequency response for a given vibration mode degrades with the increase of the applied force, which limits the force measuring range. The root cause of the response-stress dependence is investigated by means of the developed analytical model and a finite element analysis. The analysis results show that the selected operating vibration mode, the components of the structure on which the piezoelectric specimen is positioned and the boundary conditions at the contact interfaces between all the components have a direct effect on the electrical admittance spectrum. A modified structure was proposed to enhance the quality of the frequency response. The experimental tests show higher measuring range (up to 1500 N).

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Damping characteristics of a micromachined piezoelectric diaphragm-based pressure sensor for underwater applications

Cited by 8 publications

References 9 publications

Undulating Seal Whiskers Evolved Optimal Wavelength‐to‐Diameter Ratio for Efficient Reduction in Vortex‐Induced Vibrations

Undulating Seal Whiskers Evolved Optimal Wavelength‐to‐Diameter Ratio for Efficient Reduction in Vortex‐Induced Vibrations

Flexible and Wearable Piezoelectric Nanogenerators

Static force transducer based on resonant piezoelectric structure: root cause investigation

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