scattering in thin films, surface roughness, etc.; chemical instability in air and low compatibility with silicon technology represent further limitations to the exploitation of metals; [1] also, given their high carrier densities (10 22 -10 23 cm −3 ), metals usually have plasma frequencies, ω p , in the visible-UV spectral ranges. On the other hand, highly doped semiconductors (HDSCs) present several appealing features: [2,3] first, the lower carrier densities (10 16 -10 20 cm −3 ) enable plasma frequencies in the mid-infrared (MIR) spectral range, of relevance for technologically important applications, including gas detection and biosensing; [4,5] second, the carrier density and the plasmonic resonance can be tuned either by doping or geometrical patterning of semiconductors, [6] thus enabling routes to cost-effective and compact all-semiconductor plasmonic structures. [7,8] Achieving a high doping in a semiconductor can be limited by the solid solubility of the dopants [9,10] and/or by doping compensation effects. [11,12] In addition, a high density of dopants can degrade the crystal quality and induce internal losses. Thus, finding low-loss semiconductor materials for plasmonics presents challenges of fundamental and technological interest. [13] To date, a number of HDSCs have been successfully tested, including transparent conducting oxides, such as aluminum and gallium zinc oxide, [14] indium tin oxide, [15] and dysprosium cadmium oxide.[16] These materials have plasmonic resonances in the near-infrared [14,15] and MIR spectral range. [16] Compounds such as SiC, [17] (InGa)As, [18] and In(AsSb) [6,8,19] have also shown good response in the MIR. [20] The III-V semiconductor InAs features as a relatively recent addition to this group: it can sustain high doping concentrations [10,21] with plasmonic resonances over a broad MIR range. [22] Furthermore, the incorporation of small quantities of nitrogen (N < 3%) into the group-V sublattice of InAs to form the dilute nitride alloy In(AsN) enables the engineering of fundamental band properties and the behavior of dopants. [23,24] For example, the incorporation of nitrogen in InAs reduces the band gap energy of the material, while that of hydrogen in In(AsN) increases the electron density by two orders of magnitude, up to 10 19 cm −3 . [25] This enhancement, not observed in InAs or reported for other dilute nitride alloys, is due to the N-atoms, which act as H traps to form NH donor complexes Highly doped semiconductors (HDSCs) are promising candidates for plasmonic applications in the mid-infrared (MIR) spectral range. This work examines a recent addition to the HDSC family, the dilute nitride alloy In(AsN). Postgrowth hydrogenation of In(AsN) creates a highly conducting channel near the surface and a surface plasmon polariton detected by attenuated total reflection techniques. The suppression of plasmonic effects following a photoannealing of the semiconductor is attributed to the dissociation of the NH bond. This offers new routes for direct patterning of MI...