Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition

it was soon replaced by other materials. Research on the fundamental properties and preparation of TMDC monolayers in solution (1986), [8] on single-crystal substrates in ultrahigh vacuum (2001), [9] and in an accessible way using mechanical exfoliation [10] (2005) followed. It was the discovery of graphene in 2004 [11] with its ever expanding list of unique and exciting properties, phenomena, and potential applications [12] that amassed broad attention to 2D materials and resulted in the 2010 Nobel Prize in Physics awarded to Andre Geim and Konstantin Novoselov. Tremendous efforts have been put toward synthesis and applications of graphene, including the billion euro Graphene Flagship project funded by the European Union. [13,14] Graphene is a semimetal, however, and the need to have semiconducting materials for many crucial applications, in particular in electronics, has led researchers to search for other 2D materials. The scientific community turned to TMDCs following breakthroughs in observation of unique thickness-dependent properties, [15,16] monolayer synthesis using chemical vapor deposition (CVD), [17,18] and demonstration of high-performance semiconductor devices [19-21] in 2010-2013 (Figure 1). Indeed, in 2013 the number of scientific publications on TMDCs, in particular MoS 2 , nearly tripled over 2012, and the strong growth has continued to date, fueled by advances in synthesis, new devices, and exciting physical phenomena. The explosive growth in MoS 2 research has also expanded to other TMDCs, [22] resulting in yet new phenomena and potential applications being found. [23-26] It is now clear that TMDCs are remarkable in many ways. Their layered crystal structure gives rise to fundamental physics not seen in 3D materials, which enables novel devices and applications. [25,26,32,34-36] The layered structure also gives TMDCs their highly anisotropic properties, extremely high specific surface areas, possibility to intercalate different species between the layers, and stability as ultrathin sheets down to three atomic layers thick. The TMDC family contains dozens of different materials from semiconductors to semimetals, metals, and even superconductors. [5,22,25,34] However, TMDC research is still mostly in the early discovery stages and the investigations of TMDCs largely continue using flakes produced by mechanical exfoliation of bulk crystals. [10,26] Unfortunately, this method cannot be scaled up for practical 2D transition metal dichalcogenides (TMDCs) are among the most exciting materials of today. Their layered crystal structures result in unique and useful electronic, optical, catalytic, and quantum properties. To realize the technological potential of TMDCs, methods depositing uniform films of controlled thickness at low temperatures in a highly controllable, scalable, and repeatable manner are needed. Atomic layer deposition (ALD) is a chemical gas-phase thin film deposition method capable of meeting these challenges. In this review, the applications evaluated for ALD TMDCs are systematically...

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“…? nm rough films (≈50-100 nm) -2020 [233] MoCl 5 + Se 2 (SiMe 2 ) 4 300 ? nm rough films (≈20-50 nm) -2020 [233] ReS 2…”

mentioning

confidence: 99%

Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond

Mattinen

Leskelä

Ritala

2021

Adv Materials Inter

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“…Instead, the binding energy of Mo 3d at 228.3 eV corresponding to MoSe 2 was used for this purpose. 25,26 As compared to the XPS results obtained in our previous work from the MoSe 2 deposited using selenides 1 and 3, 15 one must notice relevant differences: (i) the absence of chlorine residues (mainly present by Mo-Cl species) and (ii) the well-dened Se 3d doublet. Those differences suggested the absence of impurities (other chemical species) and complete ligand exchange reaction between selenide 6 and MoCl 5 resulting in a high purity as-deposited ALD MoSe 2 .…”

Section: Preparation Of Mose 2 Akes By Aldmentioning

confidence: 72%

“…17) were reported earlier, see also our recent communication for comprehensive characterization. 15 The general methodology utilizes Li 2 Se, prepared from elemental Se and its reaction with Li or LiBHEt 3 and subsequent reaction with appropriate dichlorosilane (Method A). Compared to formerly prepared 3, the synthesis of asymmetric compound 4 starts from inexpensive silanes and affords higher yield along with more volatile selenide.…”

Section: Synthesismentioning

confidence: 99%

“…Recently, selenium dimethyldithiocarbamate was successfully used for deposition of Sb 2 Se 3 as presented by Sarkar. 13 Our research group introduced bis(trialkylstanyl)selenides 14 and cyclic silylselenides 15 as Se-precursors with decreased sensitivity towards air and moisture. Six-membered selenide containing two selenium atoms turned out to be the best precursor so far.…”

Section: Introductionmentioning

confidence: 99%

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Deposition of MoSe₂ flakes using cyclic selenides

et al. 2021

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“…In 2019, selenium dimethyldithiocarbamate, which reacts with tris(dimethylamino)antimony to form a Sb 2 Se 3 nanolayer, was introduced by Sarkar et al [9]. We have recently reported on a series of cyclic-silylselenides; in particular, the six-membered derivative bearing two selenium atoms provided very promising results during the depositing of MoSe 2 by ALD [10]. Our further synthetic work [11] has identified bis(trialkylstanyl)selenides, structurally related to bis(trialkylsilyl)selenides, as an ALD selenium precursor with lowered air sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Towards Volatile Organoselenium Compounds with Cost-Effective Synthesis

et al. 2020

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The current portfolio of organoselenium compounds applicable as volatile precursors for atomic layer deposition can be denoted as very limited. Hence, we report herein facile and cost-effective preparation of two bis(trialkylstannyl)selenides as well as one selenole and three bis(trialkylsilyl)selenides. Their syntheses have been optimized to: (i) use readily available and inexpensive starting materials, (ii) involve operationally simple methodology (heating in a pressure vessel), (iii) use a minimum amount of additives and catalysts, and (iv) either exclude additional purification or involve only simple distillation. The chemical structure of prepared Se derivatives was confirmed by multinuclear NMR and GC/MS. Their fundamental thermal properties were investigated by differential scanning calorimetry (DSC) and TGA methods that revealed thermal stability within the range of 160–300 °C.

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Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition

Cited by 9 publications

References 31 publications

Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond

Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond

Deposition of MoSe₂ flakes using cyclic selenides

Towards Volatile Organoselenium Compounds with Cost-Effective Synthesis

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Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition

Cited by 9 publications

References 31 publications

Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond

Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond

Deposition of MoSe2 flakes using cyclic selenides

Towards Volatile Organoselenium Compounds with Cost-Effective Synthesis

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Deposition of MoSe₂ flakes using cyclic selenides