1983
DOI: 10.1557/proc-23-315
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CW Backside Laser Gettering

Abstract: A variety of backside damage techniques are available for gettering heavy-metal contaminants in silicon wafers. These include mechanical damage, ion implantation, thin film deposition, and pulsed–laser surface melting. In each case, strain fields and microscopic defects induced by the processing trap impurities as they diffuse through the wafer during subsequent high–temperature processing steps. We examine the defect structures produced by CW laser gettering, describe the dependence of gettering efficiency on… Show more

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Cited by 3 publications
(2 citation statements)
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“…On the other hand, epidemiological studies have shown that the majority of ACL injuries occur during the last 15 minutes of the first half and the last 30 minutes of the second half of a game, so, once again, fatigue could be an important risk factor. These contradictions in the findings can be explained by the type of training applied to the subjects under study and by the manner in which the deficit produced by fatigue was measured 16…”
Section: Biomechanical Risk Factors Have Been Proposedmentioning
confidence: 95%
“…On the other hand, epidemiological studies have shown that the majority of ACL injuries occur during the last 15 minutes of the first half and the last 30 minutes of the second half of a game, so, once again, fatigue could be an important risk factor. These contradictions in the findings can be explained by the type of training applied to the subjects under study and by the manner in which the deficit produced by fatigue was measured 16…”
Section: Biomechanical Risk Factors Have Been Proposedmentioning
confidence: 95%
“…Most of the time, CBC results are reported earlier than clinical chemistry results. 19 20 21 If point-of-care CRP testing is not accessible, early antibiotic administration may be delayed.…”
Section: Introductionmentioning
confidence: 99%