“…It looks very likely that WC x N y may exhibit high hardness similar to TiCN, CrCN, and TiSiN systems [4][5][6][7][8]. Up to the present, some optical, electrical, and structural properties have already been reported for the WC x N y films, using different techniques such as physical vapor deposition (PVD) [9], chemical vapor deposition (CVD) [10,11] or atomic layer deposition (ALD) [3,12]. However, so far, there have been very few reports on the mechanical properties for WC x N y films.…”