CVD deposition of cobalt oxide (CO₃O₄) from Co(acac)₂

Tuning size and catalytic activity of nano-clusters of cobalt oxide

“…Humidity-sensitive Co 3 O 4 active in the visible wavelength region at room temperature has been reported. 14 Recently, there was an excellent review 15 on the adsorption and applications of cobalt species on the interface, between aqueous solutions and metal oxides. Due to various oxidation states of these oxides, they find special application as electrochromic materials exhibiting anodic electrochromism, changing colour from grey to pale yellow.…”

Controlled synthesis of Co3O4 spinel with Co(acac)3 as precursor

“…4 Several methods have been reported previously to obtain Co 3 O 4 thin films, including sol-gel, 5 spray pyrolysis, 6 atomic layer deposition, 7 sputtering 8 and chemical vapor deposition (CVD). [9][10][11] Among these techniques, pulsed-spray evaporation CVD (PSE-CVD) is considered a promising method to prepare pure films due to its low cost, simplicity, high throughput and easy control of the thickness and morphology of the samples. Particularly, PSE-CVD is suitable for precursors with limited thermal stability and well adapted for systematic synthesis of single-phase spinel or perovskite oxides with tailored composition on various relevant substrates.…”

Cobalt (II) β-diketonate adducts as new precursors for the growth of cobalt oxide films by liquid injection MOCVD

“…Cobalt oxide films have been deposited on glass, stainless steel, Si(1 0 0) or (1 1 1), fused SiO 2 , etc. by a variety of methods such as pulsed laser deposition, RF sputtering, laser ablation, electrodeposition [1,5,6,9], sol-gel [3,4,10], spray pyrolysis and conventional MOCVD [1,2,[5][6][7][8]. However, despite the interest of MOCVD of Co 3 O 4 , deposits by this technique are scarce.…”

“…However, despite the interest of MOCVD of Co 3 O 4 , deposits by this technique are scarce. The precursor was usually [Co(acac) 2 ] 4 (acac=acetylacetonate) [1,5,7,8]; however, the use of Co(acac) 3 [8], Co(OAc) 2 [9], Co(thd) 2 [12] and Co(hexafluoroacetylacetonate) 2 Á 2H 2 O [13] have been used as well. A number of cobalt(II) acac adducts with N-donors have been described [14][15][16][17][18][19].…”

“…The properties of cobalt oxides such as high catalytic activity at low cost, antiferromagnetism [1], electrochromism [2] offer a great potential for their applications. Cobalt oxide films can be used as magnetic detectors, membranes for oxidation of hydrocarbons, counter electrodes, humidity or oxygen sensors [3,4], solar-selective absorbers and protective layers [5,6].…”