2012
DOI: 10.4236/ampc.2012.22010
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Current-Voltage Characteristics of ITO/p-Si and ITO/n-Si Contact Interfaces

Abstract: We investigated the electrical contact characteristics of indium tin oxide (ITO)/doped hydrogenated amorphous silicon (a-Si:H) junctions. For efficient collection of photo-generated carriers, photovoltaic and photodetector devices require good ohmic contacts with transparent electrodes. The amorphous-Si thin films were sputter deposited on ITO coated glass substrates. As-deposited p-type a-Si:H on ITO formed nearly ohmic type contacts and further annealing did not improve the contact characteristics. On the ot… Show more

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Cited by 35 publications
(20 citation statements)
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“…In this case, the n + lITO interface is sensitive to the annealing temperature. For examp Ie, the barrier height at the n + lITO interface can be further enlarged from the formation of a thin oxide layer during the post-deposition annealing because the ITO electrode serves as an oxygen source [16], [17]. The Molp + interface in the p + p-n + stack is not involved in the increase of the rsenes because of the lack of the oxygen source.…”
Section: Methodsmentioning
confidence: 98%
“…In this case, the n + lITO interface is sensitive to the annealing temperature. For examp Ie, the barrier height at the n + lITO interface can be further enlarged from the formation of a thin oxide layer during the post-deposition annealing because the ITO electrode serves as an oxygen source [16], [17]. The Molp + interface in the p + p-n + stack is not involved in the increase of the rsenes because of the lack of the oxygen source.…”
Section: Methodsmentioning
confidence: 98%
“…Metallic layers deposited on Si substrate have been known as one of the electrical conductor system widely used as active layer, interface layer and also as connection layer between the device and external circuitry (Pethuraja et al 2012). The existence of the contact metal layer, such as Al, Cu, Pt, Ti or Au with low resistance value is necessary to enable high device operating performance with low power consumption and low energy losses.…”
Section: Introductionmentioning
confidence: 99%
“…The work functions (qΦ) of Al, Cr, Ag are, respectively, 4.08 eV, 4.5 eV, 4.26 eV [12,28,29]. And ITO has a bandgap (Eg) of 4 eV and an electron affinity (qΧ) of 4.73 eV [30,31]. On the other hand, ZnO has a bandgap of 3.4 eV and an electron affinity of 4.35 eV [12].…”
Section: Introductionmentioning
confidence: 99%