Cu-Doped ZnO Thin Films Grown by Co-deposition Using Pulsed Laser Deposition for ZnO and Radio Frequency Sputtering for Cu

Shin, Hyun Wook; Son, Jong Yeog

doi:10.1007/s11664-018-6326-2

Cited by 2 publications

(2 citation statements)

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“…These could imply, therefore, that Al 2 O 3 is uniformly distributed throughout the ZnO nanostructures. morphological features of the ZnO nanostructures grown at different parameters, changed quickly, the XRD spectra of all samples remarkably showed the same main prominent peaks attributed to the ZnO (002) c-axis, which is consistent with other previous results [11][12][13]. This, therefore, shows that the presence of other species did not modify/alter the texture of the ZnO growing along the 002 direction.…”

Section: Resultssupporting

confidence: 90%

“…Recently, this hybrid tandem system has been explored for use to design and grow doped nanostructures, coatings, and thin films. Shin and Son demonstrated co-deposition using PLD and RF sputtering to deposit Cu-doped ZnO and showed the potential applications of the dual system [13]. Voevodin et al previously explored and demonstrated this dual deposition technique in 1996, which was early for the field, using a combination of PLD and magnetron sputtering to grow carbide-and diamond-like carbon films [14].…”

Section: Introductionmentioning

confidence: 99%

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Optimization of Pulsed Laser Ablation and Radio-Frequency Sputtering Tandem System for Synthesis of 2D/3D Al2O3-ZnO Nanostructures: A Hybrid Approach to Synthesis of Nanostructures for Gas Sensing Applications

et al. 2023

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In this paper, a unique hybrid approach to design and synthesize 2D/3D Al2O3-ZnO nanostructures by simultaneous deposition is presented. Pulsed laser deposition (PLD) and RF magnetron sputtering (RFMS) methods are redeveloped into a single tandem system to create a mixed-species plasma to grow ZnO nanostructures for gas sensing applications. In this set-up, the parameters of PLD have been optimized and explored with RFMS parameters to design 2D/3D Al2O3-ZnO nanostructures, including nanoneedles/nanospikes, nanowalls, and nanorods, among others. The RF power of magnetron system with Al2O3 target is explored from 10 to 50 W, while the ZnO-loaded PLD’s laser fluence and background gases are optimized to simultaneously grow ZnO and Al2O3-ZnO nanostructures. The nanostructures are either grown via 2-step template approach, or by direct growth on Si (111) and MgO<0001> substrates. In this approach, a thin ZnO template/film was initially grown on the substrate by PLD at ~300 °C under ~10 milliTorr (1.3 Pa) O2 background pressure, followed by growth of either ZnO or Al2O3-ZnO, using PLD and RFMS simultaneously under 0.1–0.5 Torr (13–67 Pa), and Ar or Ar/O2 background in the substrate temperate range of 550–700 °C. Growth mechanisms are then proposed to explain the formation of Al2O3-ZnO nanostructures. The optimized parameters from PLD-RFMS are then used to grow nanostructures on Au-patterned Al2O3-based gas sensor to test its response to CO gas from 200 to 400 °C, and a good response is observed at ~350 °C. The grown ZnO and Al2O3-ZnO nanostructures are quite exceptional and remarkable and have potential applications in optoelectronics, such in bio/gas sensors.

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Section: Resultssupporting

confidence: 90%

Section: Introductionmentioning

confidence: 99%