Cu∕CuMg Gate Electrode for the Application of Hydrogenated Amorphous Silicon Thin-Film Transistors

Abstract

The feasibility of using Cu/CuMg as a gate electrode for a-Si:H thin-film transistors ͑TFTs͒ has been investigated in this work. The issue of adhesion between the Cu film and glass substrates has been overcome by introducing the Cu/CuMg alloy. Furthermore, a wet-etching process of Cu-based gate metal has been proposed by using the copper etchant in the conventional printed circuit boards. The experimental result showed superior performance of a-Si:H TFT with desired electrode taper angle and minimal loss of critical dimension. The a-Si:H TFT exhibited mobility of 0.37 cm 2 /V s, subthreshold slope of 0.83 V/dec, and V th of 2.02 V.

High Conductivity and Adhesion of Cu-Cr-Zr Alloy for TFT Gate Electrode

“…The differences between the Cu layer and the contact layer make it complicated in the subsequent etching process [14]. In order to improve the reliability and cost of Cu gate electrodes, another method is advocated, namely, the use of Cu alloy (Cu-Mg [15,16], Cu-Ca [17][18][19], Cu-Mn [20][21][22][23], Cu-Ti [24]) instead of pure Cu to form a diffusion barrier and adhesion layer spontaneously [25].…”

P‐64: Using Electroless Plating Technology for Copper Metallization in AMLCD Application

“…Nevertheless, the uniformity problem of EP technology limit its utility in large-size panel fabrication. [2][3][4] In this work, we propose a novel electro-less plating (ELP) method to deposit NiP serving as an adhesion layer and copper film self-aligned on it on glass substrate. ELP technology not only saves more cost than the conventional sputtering process because it can be processed in ambient air.…”

Fabricating metal structures with taper angles and smooth sidewalls

“…Used as electrodes, tapered edges could improve the step coverage and prevent interlayer defects [7]. Applied to integrated photonic systems, tapered-metal-grating structures could exhibit high-contrast broadband asymmetric transmission covering the entire visible region [8].…”