2019
DOI: 10.1080/02670844.2018.1555913
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Crystallography characteristics of tetragonal nano-zirconia films under various oxygen partial pressure

Abstract: Structural features and surface morphology of ZrO 2 thin films electron beam evaporationdeposited under various oxygen partial pressure were studied. It was indicated tetragonal phase for all samples by XRD pattern. The highest crystallite size calculated via Scherrer equation is observed at the oxygen partial pressure of 7 × 10 −3 mbar; that was in good agreement with the high-resolution surface images obtained by FE-SEM. The photoluminescence spectrum of t-zirconia films exhibits an intense peak at 351 nm, t… Show more

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Cited by 4 publications
(4 citation statements)
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“…There are two values (0.8 and 1.6 nm/s for 600 °C) shifted from the dependence due to the effect of deposition rate. Obtained values of surface roughness are similar to other authors' results [44][45][46]. The deposition rate affects the growth of ScAlSZ thin films, also (Figure 3).…”
Section: Resultssupporting
confidence: 90%
“…There are two values (0.8 and 1.6 nm/s for 600 °C) shifted from the dependence due to the effect of deposition rate. Obtained values of surface roughness are similar to other authors' results [44][45][46]. The deposition rate affects the growth of ScAlSZ thin films, also (Figure 3).…”
Section: Resultssupporting
confidence: 90%
“…It is seen symmetric height distribution in the case of annealed at 500 • C because the skewness has a value close to zero. The kurtosis (S ku ) value of all samples is less than 3, which points to the presence of few peaks or valleys [34].…”
Section: Resultsmentioning
confidence: 95%
“…The values of the lattice parameters a and c were found to be increases up to 4 wt-% Mg doping and then it decreases for 6 wt-% MZO. Such an irregular variation in a and c values may be attributed to the uneven variation of the cell structure of the films due to the substitution of Zn 2+ ions by Mg 2+ ions [26,27].…”
Section: Resultsmentioning
confidence: 99%