“…The properties of the first principal stress in the specimen, with infinite length and cross-section dimension of 50×50 μm and the film cross-section dimension of 50 ×(1-4) μm, were studied through FEA. Before modeling, it was assumed that: (1) The upper surface of film is a flat plane, no matter what the substrate surface roughness is; (2) All kinds of peaks on the substrate surface in a model with the same Ra s are represented by isosceles triangles with the same dimension; (3) There are no defects, such as pores, voids, and cracks etc., in the film-substrate system in any case; (4) The physical properties of materials are kept constant during FEA; (5) The materials of film and substrate are isotropic. On the basis of the assumptions, a simplified 2D model was defined for studying the effects of such factors as deposition temperature, film thickness, and Ra s , on the first principal stress, as shown in Fig.…”