Finite element analysis of stress in contacting zone of film and substrate

Han, Jiecai; Zhou, Yanjun

doi:10.1016/j.surfcoat.2008.12.024

Cited by 8 publications

(3 citation statements)

References 11 publications

(12 reference statements)

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“…(2) In the process of finite element analysis, the physical properties of materials remain constant. (3) The materials of the thin film and substrate are isotropic [18]. Based on the hypothesis, we define a simplified two-dimensional model.…”

Section: Modelingmentioning

confidence: 99%

“…The effect of the coating process on the residual Mises equivalent stress between the fiber grating and palladium film system is discussed to improve the durability of the fiber grating hydrogen sensor. Based on the simplified two-dimensional model [18], we use the life-and-death element method [19]. By using this method, the effects of different film thickness, coating speed, and the number of film layers on the residual Mises between the sensor film and substrate are simulated.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Durability Optimization of Fiber Grating Hydrogen Sensor Based on Residual Stress

Yang³

et al. 2021

Sensors

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In this paper, in order to improve the durability of optical fiber grating hydrogen sensors, an optical fiber grating hydrogen sensor with high precision, stability, and durability is prepared. Based on the simplified two-dimensional model and finite element analysis, the effects of film thickness, coating speed, and coating times on the residual Mises equivalent stress between the sensor film and substrate were studied, and the optimum coating parameters were determined. The finite element analysis results show that the residual equivalent stress between the film and the substrate increases with the increase in the film thickness between 50 and 150 nm. The range of 200–250 nm is relatively stable, and the value is small. The coating speed has almost no effect on the residual equivalent stress. When the thickness of the film is 200 nm, the residual equivalent stress decreases with the increase in coating times, and the equivalent force is the lowest when the film is coated three times. The best coating parameters are the thickness of 200 nm, the speed of 62.5 μm/s, and the times of coating three times. The results of finite element analysis are verified by the hydrogen sensitivity test and durability test.

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Section: Modelingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Durability Optimization of Fiber Grating Hydrogen Sensor Based on Residual Stress

Yang³

et al. 2021

Sensors

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show abstract

“…Besides analytical analyses, some numerical studies have also been done on 2D simulation of thermal stresses in a film-substrate composite (Haider et al, 2005;Han et al, 2009;Wright et al, 1994). These studies mainly focus on the effects of film thickness and deposition temperature on thermal stresses utilizing finite element method.…”

Section: Introductionmentioning

confidence: 99%