2020
DOI: 10.3390/ma13020267
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Crystallographic Characterisation of Ultra-Thin, or Amorphous Transparent Conducting Oxides—The Case for Raman Spectroscopy

Abstract: The electronic and optical properties of transparent conducting oxides (TCOs) are closely linked to their crystallographic structure on a macroscopic (grain sizes) and microscopic (bond structure) level. With the increasing drive towards using reduced film thicknesses in devices and growing interest in amorphous TCOs such as n-type InGaZnO 4 (IGZO), ZnSnO 3 (ZTO), p-type Cu x CrO 2 , or ZnRh 2 O 4 , the task of gaining in-depth knowledge on their crystal structure by… Show more

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Cited by 10 publications
(10 citation statements)
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“…11,13 Conductivity variations were instead driven by large variations in the mobility. Best samples show high mobilities with a maxima of 9-10 cm 2 /Vs being observed for a wide range of film compositions, but this is a noticeable reduction from literature best values of >16 cm 2 /Vs, 13,32,35 which are achieved without special treatments.…”
Section: Resultsmentioning
confidence: 78%
“…11,13 Conductivity variations were instead driven by large variations in the mobility. Best samples show high mobilities with a maxima of 9-10 cm 2 /Vs being observed for a wide range of film compositions, but this is a noticeable reduction from literature best values of >16 cm 2 /Vs, 13,32,35 which are achieved without special treatments.…”
Section: Resultsmentioning
confidence: 78%
“…1a, b. Raman spectroscopy was also used to provide information on the quality of the material synthesized, as shown in Supplementary Fig. 1c 39 . XRD allowed the crystallinity of the PtTe 2 film to be examined (see Supplementary Fig.…”
Section: Resultsmentioning
confidence: 99%
“…It remains thereby difficult to distinguish a priori from which thickness one can rely on the extracted signal. Furthermore, the subtraction of the dominant substrate signal is vulnerable to the acquisition noise and the choice of the baseline subtraction [50]. This is particularly important in the present work as the silica films have very weak Raman intensities (due to the low cross-section of the silica film and its small thickness) that are already dominated by noise and that overlap with the likewise broad signal of the glass substrate.…”
Section: Optimizing the Extraction Of The Raman Signal Signature Of The Sputtered Silica Filmmentioning
confidence: 99%
“…In this case, it is highly challenging to obtain an accurate Raman spectra of the layer due to the similarity between the two Raman signals. This makes the subtraction of the substrate background difficult and leads to inconsistent or inaccurate results [50]. In consequence, the number of Raman structural investigations on amorphous silica thin film (<1 µm), that has additionally a low Raman cross-section [51], is very limited [52].…”
Section: Introductionmentioning
confidence: 99%