In this study, the dependence of the turn-off surge on gate resistance (R
G) and temperature in Silicon insulated gate bipolar transistors was investigated. From the measured and simulated results, it became clear that the surge decrease that occurs with small R
G derives from a dynamic avalanche phenomenon adjacent to the bottom of the trench. This phenomenon enables us to explain the dependence of the turn-off surge on not only the temperature but also on other conditions. It was confirmed that the amount of surge decrease with small R
G is mainly determined by the collector current when the gate to emitter voltage reaches the threshold voltage. In addition, it was found that this surge decrease is affected even by a smaller avalanche generation rate compared with that in a critical electric field. This is due to a so-called “micro” dynamic avalanche phenomenon. This micro dynamic avalanche phenomenon plays a crucial role in turn-off surge, especially with small R
G.