Crater formation and sputtering by cluster impacts

Insepov, Z.; Allen, L.P.; Santeufemio, C.; Jones, K. S.; Yamada, Isao

doi:10.1016/s0168-583x(03)00876-0

Cited by 14 publications

(4 citation statements)

References 13 publications

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“…Craters are part of the widespread phenomena observed in nature, going from impact meteorite craters to volcanic structures. Studies of crater morphologies have a wide range of applications, going from puzzling crater formation in drying paint [1] to molecular dynamics [2,3,4]. Among the main applications to natural phenomena, aside from meteorite impact crater, are the formation and growth of volcanic edifices, by successive ejecta emplacement and/or erosion.…”

Section: Introductionmentioning

confidence: 99%

Dynamics of crater formations in immersed granular materials

2009

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We report the formation of a crater at the free surface of an immersed granular bed, locally crossed by an ascending gas flow. In two dimensions, the crater consists of two piles which develop around the location of the gas emission. We observe that the typical size of the crater increases logarithmically with time, independently of the gas emission dynamics. We describe the related granular flows and give an account of the influence of the experimental parameters, especially of the grain size and of the gas flow.

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Section: Introductionmentioning

confidence: 99%

Dynamics of crater formations in immersed granular materials

2009

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“…Almost all of the Ar atoms in the incident cluster leave the target and the crater-like damage is left on the surface. This characteristic crater formation has been confirmed by MD simulations of other materials [21][22][23] and by experiments [24,25]. During the crater formation process, some atoms at the rim may gain enough energy to leave the target, which is a feature of sputtering with huge clusters [26][27][28].…”

Section: Large Gas Cluster Impact and Crater Formationmentioning

confidence: 54%

Molecular dynamics simulations of cluster impacts on solid targets: implantation, surface modification, and sputtering

Aoki

2013

J Comput Electron

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The collisions of cluster projectiles on solid targets were studied using molecular dynamics (MD) simulations. The penetration range and damage induced by small boron and carbon cluster implantations are compared with those induced by monomers with the same energy per atom. The simulations indicated enhanced penetration depth and the formation of dense track damage at the surface region. In addition, large argon and fluorine clusters (up to 1 million atoms) have shown effects such as crater formation and low-damage surface etching of silicon. The MD simulations revealed that cluster penetration and crater formation depends not on the total incident energy, but on the incident energy per atom, and that the damage threshold for the argon cluster is several eV/atom. In the impact of a very large and slow fluorine cluster on silicon, an enhancement of chemical reactivity at the near surface region was observed because of the high density of fluorine molecules depositing kinetic energy.

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“…As discussed, this is the scale of roughness that is expected to contribute to field emission, direct evidence that GCIB is effective at smoothing features that could not be smoothed even using the best of previous mechanical polishing techniques for non-planar electrodes. The effective size scale for GCIB polishing is determined by the properties of the surface, the average size of craters made by individual cluster impacts (typically in the range of 10-20 nm for high energy Ar clusters [9][10][11][12][13]), and by the applied GCIB dose. We have seen similar results when treating Ti surfaces with similar initial polish using Ar GCIB.…”

Section: Stainless Steel Electrode Materialsmentioning

confidence: 99%