CPW high Q inductors on organic substrates

Dalmia, S.; Lee, Seock Hee; Min, Sung Hwan; Swaminathan, Madhavan; Tummala, Rao

doi:10.1109/epep.2001.967622

Cited by 6 publications

(3 citation statements)

References 2 publications

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“…Coplanar waveguides (CPWs) on dielectric substrates were introduced in 1969 [11] and they are commonly used in microwave monolithic integrated circuits (MMICs) [12]. A multitude of CPW components have emerged with high performances: CPW inductors [13][14][15], CPW capacitors [16,17], microstrip lines and slotlines [18]. CPW components allow fast and inexpensive fabrication and characterization of RF circuits such as filters, couplers and amplifiers [19].…”

Section: Capacitance Variationsmentioning

confidence: 99%

Design and fabrication of a continuously tuned capacitor by microfluidic actuation

Habbachi

Boussetta

Boukabache

et al. 2018

J. Micromech. Microeng.

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This paper presents the design and the fabrication of a continuously tunable RF MEMS capacitor using micro fluidics as a tuning parameter. The impedance variation principle is based on the modification of the capacitor gap permittivity produced by the presence of deionized water and its displacements in a channel inserted between electrodes. In addition, the electric field distribution changes in equiponderant way according to the DI water positions in the channel. This change modifies the capacitive coupling, the stored energy and consequently the self-resonant frequency. The fabrication process is based on two parts: metallic paths having a spiral form, and obtained by electroplating a 7 µm thick gold layer to constitute electrodes; and fluidic channels, realized by super imposing two SU-8 films. The measurements show a non-linear variation of the capacitor value according to the water positions. The tuning range is very large, reaching up to 4650% for the capacitance, and 335% for the resonant frequency. However, the quality factor reaches Qmax = 79 at 550 MHz if the capacitor is empty and decreases with the fluid displacements to Qmin = 3.13.

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Section: Capacitance Variationsmentioning

confidence: 99%

Design and fabrication of a continuously tuned capacitor by microfluidic actuation

Habbachi

Boussetta

Boukabache

et al. 2018

J. Micromech. Microeng.

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“…Various highly intergrable multilayer technologies such as low [3] and high temperature co-fired ceramic (LTCC and HTCC) and MCM-D [4] have been the most suitable technologies for implementing a complete SOP solution. However, organic process technology [5] is currently being studied to achieve complete SOP solutions. Advantages of SOP include: lower cost and design flexibility due to the use of embedded high passives, minimization of loss and parasitic effects due to the reduction in the number and lengths of interconnections and reduction of module size due to the multilayer topology.…”

Section: Sop Technologymentioning

confidence: 99%

Integrated RF architectures in fully-organic SOP technology

Davis

Sutono

Yoon

et al. 2002

IEEE Trans. Adv. Packag.

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Future wireless communications systems require better performance, lower cost, and compact RF front-end footprint. The RF front-end module development and its level of integration are, thus, continuous challenges. In most of the presently used microwave integrated circuit technologies, it is difficult to integrate the passives efficiently with required quality. Another critical obstacle in the design of passive components, which occupy the highest percentage of integrated circuit and circuit board real estate, includes the effort to reduce the module size. These issues can be addressed with multilayer substrate technology. A multilayer organic (MLO)-based process offers the potential as the next generation technology of choice for electronic packaging. It uses a cost effective process, while offering design flexibility and optimized integration due to its multilayer topology. We present the design, model, and measurement data of RF-microwave multilayer transitions and integrated passives implemented in a MLO system on package (SOP) technology. Compact, high inductors, and embedded filter designs for wireless module applications are demonstrated for the first time in this technology.

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“…Some discrete inductors have already been fabricated on polyimide substrates, but they operate in relatively low frequencies and cannot be monolithically integrated with flexible TFTs and PIN diodes [11]. In addition, other flexible substrate-based approaches, such as design and modeling of high-Q coplanar waveguide (CPW) inductors, low-cost CPW meander inductors utilizing ink-jet printing, and vertically-integrated inkjet-printed high-performance inductors [12,13,14], have been reported. However, to date, there has been very little investigation into the characterization of spiral inductors on flexible substrates.…”

Section: Introductionmentioning

confidence: 99%

Characterization of flexible radio-frequency spiral inductors on a plastic substrate

Qin

Liu

et al. 2016

IEICE Electron. Express

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This paper describes the design and fabrication of flexible radiofrequency inductors integrated on a polyethylene terephthalate substrate. Experimental and modeling results for the RF responses of flexible inductors are reported. Investigations and analysis have been conducted on the effects of layout and process parameters on the frequency responses of inductance, quality factor and self-resonant frequency of the spiral inductors. The influence of bending strain on the performance of spiral inductors is also investigated based on measurement and modeling results. The analysis provides guidelines for designing the flexible spiral inductors towards the flexible monolithic microwave integrated circuits on a plastic substrate. Keywords: characterization, flexible, plastic substrate, quality factor, selfresonant frequency, spiral inductor Classification: Electron devices, circuits and modules References

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CPW high Q inductors on organic substrates

Cited by 6 publications

References 2 publications

Design and fabrication of a continuously tuned capacitor by microfluidic actuation

Design and fabrication of a continuously tuned capacitor by microfluidic actuation

Integrated RF architectures in fully-organic SOP technology

Characterization of flexible radio-frequency spiral inductors on a plastic substrate

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