Corrosion mitigation coatings for RF sources and components

Ives, R. Lawrence; Collins, George; Marsden, David; Bui, Thuc; Mitsdarffer, Bryan; Oldham, Christopher J.; Daubert, James S.; Gremaud, Antonie P.; Parsons, Gregory N.

doi:10.1109/ivec.2016.7561851

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“…This is in agreement with the good corrosion and oxidation resistance of Cr 7 C 3 at high temperature [28]. The second and the third criteria could be satisfied by an ALD process, as reported in a complex cooling circuit but ALD suffers from very low growth rates, which is not adapted to develop protective coatings about 10 μm thick [29]. These last two criteria can be addressed by the CVD technique with the help of numerical modeling.…”

Section: Experimental and Calculationssupporting

confidence: 73%