2009
DOI: 10.1109/jlt.2009.2021562
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Correlation of Scattering Loss, Sidewall Roughness and Waveguide Width in Silicon-on-Insulator (SOI) Ridge Waveguides

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Cited by 85 publications
(31 citation statements)
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“…However, the contribution to the radiative loss generated by the roughness of the top/bottom surfaces is typically negligible compared to the sidewall roughness, and the 3D model (6) simply reduces to equation (5) (A = 0). This result is well in accordance with those reported by Yap et al in [11]. As for the slab waveguide, for 3D laterally confined waveguides the parameters A and A can also be considered independent of w and h. Equation (5) hence provides a simple and accurate fitting rule for both fundamental and higher order modes of 2D and 3D waveguides.…”
Section: Radiation Loss Modelsupporting
confidence: 90%
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“…However, the contribution to the radiative loss generated by the roughness of the top/bottom surfaces is typically negligible compared to the sidewall roughness, and the 3D model (6) simply reduces to equation (5) (A = 0). This result is well in accordance with those reported by Yap et al in [11]. As for the slab waveguide, for 3D laterally confined waveguides the parameters A and A can also be considered independent of w and h. Equation (5) hence provides a simple and accurate fitting rule for both fundamental and higher order modes of 2D and 3D waveguides.…”
Section: Radiation Loss Modelsupporting
confidence: 90%
“…Even though the Payne-Lacey model was originally developed only for 2D slab waveguides, it has been applied also to 3D structures through the effective index method [8,9,11]. Good agreement between the numerical model and the experimental results was observed also in these cases.…”
Section: Radiation Loss Modelmentioning
confidence: 95%
“…1, the measured loss is likely due to scattering at the surface due to roughness. Such scattering loss can be quantitatively estimated by using the Payne–Laycey model [3132]. The scattering loss α (in units of dB/unit length) scales quadratically with the surface roughness σ as…”
Section: Resultsmentioning
confidence: 99%
“…The first design is simpler and more straightforward to combine with other on-chip SM functionalities, such as beam splitters or interferometers. However, small width WGs tend to have larger propagation losses since a less tightly confined mode is more susceptible to scattering due to sidewalls roughness . Indeed, in the case of the considered system we observe propagation losses on the level of 2–3.5 dB/mm for 2.0 μm width WGs and 4–7 dB/mm in the case of 0.8 μm WGs.…”
mentioning
confidence: 74%