Correlation between the characteristics of a pulsed microwave plasma used for diamond growth and the properties of the produced films

Lamara, T.; Belmahi, M.; Henrion, G.; Hugon, R.; Bougdira, J.; Fabry, M.; Remy, M.

doi:10.1016/j.surfcoat.2005.01.050

Cited by 9 publications

(9 citation statements)

References 11 publications

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“…The temperature was measured by means of an infrared bicolor pyrometer. The gas mixture composition was ensured by mass flowmeters that were computer-controlled in order to maintain both the CH 4 -H 2 ratio and the total pressure at constant values [10,13].…”

Section: Methodsmentioning

confidence: 99%

“…The difference between these two techniques is that the first is able to independently control the plasma density as well as the degree of dissociation, while the second controls the surface chemistry and the growth mechanisms. In this study, we have developed an MPACVD system using a continuous microwave source at 2.45 GHz and have obtained interesting results for diamond growth, especially by studying the role of atomic hydrogen in such a process [8][9][10].…”

Section: Introductionmentioning

confidence: 99%

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The use of microwave plasma-assisted CVD on nanostructured iron catalysts to grow isolated bundles of carbon nanotubes

et al. 2010

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Catalysts play a key role in the growth of carbon nanotubes. The microwave plasma-assisted chemical vapor deposition (MPACVD) method is now commonly used for directional and conformal growth of carbon nanotubes (CNTs) on substrates. In this work, we report on the effect of H(2) plasma pre-treatment on the diameter and density of iron catalyst nanoparticles for different iron layer thicknesses in order to grow isolated bundles of CNTs. Atomic force microscopy shows first that as plasma power density increases, iron nanoparticle diameters decrease, which is due to the increasing of gas dissociation giving more ion bombardment energy, and second that the diameter of nanoparticles decreases with the catalyst thickness. The growth of CNT was carried out under different CH(4) concentrations for different iron film thicknesses. Transmission electron microscopy and Raman spectroscopy show that the synthesized CNT were of good quality and had an outer diameter between 5 and 10 nm.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

The use of microwave plasma-assisted CVD on nanostructured iron catalysts to grow isolated bundles of carbon nanotubes

et al. 2010

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“…For this application, microwave plasma discharge is produced using feed gas consisting mainly of hydrogen and a few percents of hydrocarbon species such as methane. Hydrogen atoms constitute the main governing species for diamond deposition [1,3,5,7,19,20,29,31], this is due to the high reactivity of these atoms produced by electron impact dissociation of molecular hydrogen [5].…”

Section: Introductionmentioning

confidence: 99%

Numerical study of microwave plasma characteristics in moderate pressure used for diamond deposition

Bojaddaini¹,

Chatei²,

Atounti³

et al. 2013

astp

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The present paper provides the results of numerical simulation obtained using a fluid model approach of pure hydrogen microwave plasma, at moderate pressure, in two-dimensional cylindrical geometry. The governing equations consist of continuity equations of electrons and ions in drift-diffusion approximation, as well as Poisson equation for self-consistent electric field. Dependencies of discharge characteristics, such as densities of charged particles and plasma potential, on the 1072 M. El Bojaddaini et al. main physical parameters namely the hydrogen pressure and the power density have been numerically studied. It is seen that the electron and ion densities were in the range of 5.10 16-3,3.10 17 m-3 for the pressure range of 35-49 Torr. It is also shown that as the power density increases the charged particles densities increase significantly; and that the plasma potential varies slightly with pressure and power density.

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“…However, it is not easy to prepare specific polymers such as heterocyclic polymers due to sensitive chemical groups. It has been proposed that pulsed plasma interactions with substrates result in higher retention of the monomer structure compared with continuous wave (CW) plasma polymerization [11]. Since pulsing the plasma excitation varies the degree of ion bombardment, film and gas phase composition can be better controlled in pulsed glow discharge.…”

Section: Introductionmentioning

confidence: 99%

Pyrrole thin films deposited on paper by pulsed RF plasma

Şahin

2007

Open Chemistry

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Attempts were made to plasma deposit an oriented π-conjugated polymer of pyrrole (Py) on paper surfaces in order to produce electrically conductive layers. The N/C atomic ratio of 0.13 − 0.24 was observed for all treatment conditions. This implies the nature of the deposition formed on the paper surface via pulsed plasma is different from that of pyrrole monomer. An increase in conductivity of all pyrrole-plasma treated papers was observed. The 50 W RF-power with 5 min plasma exposed paper sample shows 8.15 × 10 −9 S·cm −1 conductivity. The conductivity measurements indicated a plasmaenhanced ring-opening reaction mechanism of pyrrole.

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Correlation between the characteristics of a pulsed microwave plasma used for diamond growth and the properties of the produced films

Cited by 9 publications

References 11 publications

The use of microwave plasma-assisted CVD on nanostructured iron catalysts to grow isolated bundles of carbon nanotubes

The use of microwave plasma-assisted CVD on nanostructured iron catalysts to grow isolated bundles of carbon nanotubes

Numerical study of microwave plasma characteristics in moderate pressure used for diamond deposition

Pyrrole thin films deposited on paper by pulsed RF plasma

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