Numerical study of microwave plasma characteristics in moderate pressure used for diamond deposition

Abstract

The present paper provides the results of numerical simulation obtained using a fluid model approach of pure hydrogen microwave plasma, at moderate pressure, in two-dimensional cylindrical geometry. The governing equations consist of continuity equations of electrons and ions in drift-diffusion approximation, as well as Poisson equation for self-consistent electric field. Dependencies of discharge characteristics, such as densities of charged particles and plasma potential, on the 1072 M. El Bojaddaini et al. main physical parameters namely the hydrogen pressure and the power density have been numerically studied. It is seen that the electron and ion densities were in the range of 5.10 16-3,3.10 17 m-3 for the pressure range of 35-49 Torr. It is also shown that as the power density increases the charged particles densities increase significantly; and that the plasma potential varies slightly with pressure and power density.