Abstract:The surface morphology and preferential orientation of μc-Si:H has been studied on c-Si substrate in relation to the Si-H bonding mode. Epitaxy-like growth is observed on Si (001) substrate at a moderate temperature and under low ion bombardment, while the surface is significantly roughened. With increasing or decreasing the temperature or increasing the ion bombardment, the lattice orientation is randomized and an amorphous component is increased, resulting in the reduction of the surface roughness. The growt… Show more
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