Correlation between structural and optical properties of WO3 thin films sputter deposited by glancing angle deposition

Abstract

. Correlation between structural and optical properties of WO3 thin films sputter deposited by glancing angle deposition. Thin Solid Films, Elsevier, 2013, 534, pp.275 -281 porous architecture, which is favoured for incident angles higher than 50°. Optical band gap E g , 23Urbach energy E u and birefringence ∆n 617 , determined from optical transmittance measurements, 24are also influenced by the orientation of the columns and their trend are discussed taking into 25 account the disorder produced by the inclined particle flux.

Optical properties of nanostructured WO3 thin films by GLancing Angle Deposition: Comparison between experiment and simulation

“…This method is based on the tunable control of the relative position of the substrate, mobile or not, with respect to the vapor source. To this aim, the deposition angle α and the substrate rotational angle φ are two parameters, which can be changed to engineer a wide variety of structures at the micro-and nanoscale such as straight pillars [2,3], inclined columns [4,5], and zigzag architectures [6][7][8][9]. This wide diversity of structures translates into a large diversity of physical properties that can be particularly attractive for many application domains such as solar cells [10], gas and liquid sensors [11] or electrically actuated devices [12].…”

Study of the electrical behavior of nanostructured Ti–Ag thin films, prepared by Glancing Angle Deposition

“…This characteristic could be related to the non-formation of Ti-Ag intermetallic phases. Indeed, recent works on thin films produced by GLAD, reported a dependence of crystallinity on the deposition angle [23]. In this specific case, the sample produced using the normal flux incidence angle reveals a weak crystallization of Ti-Ag phases.…”

Structural, Morphological and Optical Properties of Sn3Sb2S6 Thin Films Synthesized by Oblique Angle Deposition

“…26 Charles et al have argued that it is mainly ascribed to the growth of a more porous structure versus incident angle. 27 One may deduce that in the evaporation process, the film density is a function of shadow length and thus can be tuned by the incident angle. So, this can be attributed to the porous structure in the GLAD films, which will inevitably result in a decrease in the refractive index and an increase in the transmittance.…”