Controlling the optical properties of hafnium dioxide thin films deposited with electron cyclotron resonance ion beam deposition

Gier, Chalisa; Yaala, M. Ben; Wiseman, Callum; Macfoy, S.; Chicoine, M.; Schiettekatte, F.; Hough, J.; Rowan, S.; Martin, I. W.; MacKay, Peter; Reid, S.

doi:10.1016/j.tsf.2023.139781

Cited by 5 publications

(2 citation statements)

References 45 publications

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“…Even in the absence of oxygen being introduced into the vacuum chamber during the procedure, all the coatings manufactured display a significant oxygen content in the range of 13%-17%. This percentage includes the native oxide layer on the surface that forms after exposing the substrate to air (during the transfer from the coating chamber to the EDS measurements), the interstitial O 2 that gets trapped in the coatings in a form of bubble due to the IBD process [40,41] as well as the dissociated oxygen that gets bonded to the nitrogen and silicon atoms. For fixed beam energy, the oxygen concentration is almost invariable up to 800 • C and increases from 800 • C to 900 • C for all samples suggesting that the refractive index change for temperature below 800 • C is mostly due to the structure change of the silicon (oxy)nitride.…”

Section: Optical Absorption Of Sinx Coatingsmentioning

confidence: 99%

Non-stoichiometric silicon nitride for future gravitational wave detectors

Wallace,

Ben Yaala,

Tait

et al. 2024

Class. Quantum Grav.

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Silicon nitride thin films were deposited at room temperature employing a custom ion beam deposition (IBD) system. The stoichiometry of these films was tuned by controlling the nitrogen gas flow through the ion source and a process gas ring. A correlation is established between the process parameters, such as ion beam voltage and ion current, and the optical and mechanical properties of the films based on post-deposition heat treatment. The results show that with increasing heat treatment temperature, the mechanical loss of these materials as well as their optical absorption decreases producing films with an extinction coefficient as low as k = 6.2(±0.5)×10−7at 1064nm for samples annealed at 900○C. This presents the lowest value for IBD SiNx within the context of gravitational wave detector applications. The mechanical loss of the films was measured to be ϕ = 2.1(±0.6) × 10−4 once annealed post deposition to900○C.

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Section: Optical Absorption Of Sinx Coatingsmentioning

confidence: 99%

Non-stoichiometric silicon nitride for future gravitational wave detectors

Wallace,

Ben Yaala,

Tait

et al. 2024

Class. Quantum Grav.

Self Cite

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“…Hafnium oxide is commonly used in electronics because of its high dielectric constant. It has a wide band gap (>5 eV) [4], high refractive index [5], and has been used extensively as antireflection and optical coatings for interference filters [6,7]. HfO 2 is also a high-density material (~10 g/cm 3 ), and, when activated with rare earth elements (i.e., Eu 3+ ), acts as good scintillating materials and thermal barrier coatings for operation in harsh and high-temperature environments [8][9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Impact of Europium and Niobium Doping on Hafnium Oxide (HfO2): Comparative Analysis of Sol–Gel and Combustion Synthesis Methods

Laganovska,

Vitola,

Einbergs

et al. 2023

Ceramics

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This study compares HfO2 ceramics synthesized using sol–gel and combustion methods, emphasizing the impact of the method of synthesis on the resulting properties of the material. The research findings illustrate morphological differences between sol–gel and combustion-derived HfO2. While sol–gel samples displayed irregular nanoparticles with pronounced boundaries, combustion samples revealed more homogeneous structures with particles tending towards coalescence. It was discerned that Eu3+ doping induced oxygen vacancies, stabilizing the tetragonal phase, while subsequent doping with Nb5+ significantly reduced these vacancies, which was also observed in photoluminescence analysis. Furthermore, combustion synthesis left fewer organic residues, with urea presence during synthesis contributing to residual organic components in the material. XPS analysis was used to evaluate the presence of oxygen-deficient hafnia sub-oxide in the samples. The study underscores the important role of tailored synthesis methods in optimizing the properties and applications of HfO2.

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Effect of Zr substitution on structural, electronic, thermodynamic and optical properties of $$(\textrm{HfO}_2)_{\text{p}}$$ clusters: a DFT study of $$(\textrm{HfO}_2)_{\textrm{p}}$$ and $$\textrm{Hf}_{\textrm{q}} \textrm{Zr}_{\text {r}} \textrm{O}_{2(\textrm{q}+\textrm{r})}$$ clusters

Kashyap,

Batra

2024

J Nanopart Res

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Controlling the optical properties of hafnium dioxide thin films deposited with electron cyclotron resonance ion beam deposition

Cited by 5 publications

References 45 publications

Non-stoichiometric silicon nitride for future gravitational wave detectors

Non-stoichiometric silicon nitride for future gravitational wave detectors

Impact of Europium and Niobium Doping on Hafnium Oxide (HfO2): Comparative Analysis of Sol–Gel and Combustion Synthesis Methods

Effect of Zr substitution on structural, electronic, thermodynamic and optical properties of $$(\textrm{HfO}_2)_{\text{p}}$$ clusters: a DFT study of $$(\textrm{HfO}_2)_{\textrm{p}}$$ and $$\textrm{Hf}_{\textrm{q}} \textrm{Zr}_{\text {r}} \textrm{O}_{2(\textrm{q}+\textrm{r})}$$ clusters

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