1966
DOI: 10.1149/1.2423810
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Controlled Vapor-Liquid-Solid Growth of Silicon Crystals

Abstract: J. DiPiazza for their assistance, and J. White for the use of his gallium arsenide curves. ABSTRACTThe experimental procedure for controlled vapor-liquid-solid, or VLS, crystal growth is discussed for silicon. The hydrogen reduction of SIC14 was used as transport reaction, and gold as the liquid-forming impurity. The stability of the liquid droplet, which is the main criterion for controlled VLS growth, is discussed in detail. It is shown that an adverse temperature gradient or an oversupply of silicon from th… Show more

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Cited by 62 publications
(35 citation statements)
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“…1). This result is in contrast to those in previous words, in which the nanowire became thicker as the growth temperature increased [24,25]. One possible explanation is that the growth of GaN nanowires occurs in a diffusion-induced mode.…”
Section: Resultscontrasting
confidence: 97%
“…1). This result is in contrast to those in previous words, in which the nanowire became thicker as the growth temperature increased [24,25]. One possible explanation is that the growth of GaN nanowires occurs in a diffusion-induced mode.…”
Section: Resultscontrasting
confidence: 97%
“…9,13,15,23,27,28 This section of our study analyzes the effects of the partial pressure of germane, on the epitaxy of germanium nanowires on silicon substrates. In order to clearly understand the interdependencies of the partial pressure of germane on epitaxial nanowire growth, experiments were conducted with partial pressures of 0.275, 0.44, 0.7, and 1.8 Torr.…”
Section: Effect Of Partial Pressurementioning
confidence: 99%
“…The vertical NW growth is correspondingly reproduced after the complicated kink formation (Fig. 2(c)) [19,21]. It should be also noted that the axial NW growth rate in each growth segment ðDv ¼ Dl=tÞ is progressively reduced, as in Fig.…”
Section: Resultsmentioning
confidence: 75%